Abstract:Human thermal comfort is highly influenced by environmental parameters such as temperature, relative humidity (RH), and air velocity in addition to personal factors. The available sensors to measure these environmental parameters are stand-alone and can be very bulky and expensive, especially the air velocity sensor. Therefore, it is a challenge to measure human thermal comfort in smart buildings and most of the buildings utilize only temperature sensor to control the indoor climate. This work integrates multienvironmental sensors (temperature, humidity, and air velocity) on a single chip using low-cost CMOS-compatible MEMS technology. The multisensor chip (MSC) is successfully packaged and tested in experimental setups to characterize the temperature, humidity, and air velocity sensors integrated into it. The experimental results indicated that the air velocity sensor consumed low power (0.75 mW) while still achieving a much higher sensitivity of 123.8 mV/(m/s). Besides, the MSC's RH sensor achieved an average sensitivity of 15.17 fF/%RH and covered the 7% to 82 % RH range, whereas the temperature sensor demonstrated a sensitivity of 25.2 mV/°C during testing, covering a temperature range of 3 °C to 53 °C. Furthermore, the crosstalk study concluded that because of the low power operation of the air velocity sensor, a very negligible heat is transferred to the substrate. The overall chip temperature increases only by 0.1 °C due to the operation of the multisensors. This is quite low compared to the reported MSCs, where the chips' temperature raised by 2 °C to 10 °C affecting the performance of the individual sensors located on the same chip. The results suggested that the developed MSC is promising for measuring environmental parameters in smart buildings in the Internet of Things (IoT) era.

Implementation of a monolithic soc environmental sensing hub using cmos-mems technique

Monolithic Integration of Pressure/Humidity/Temperature Sensors for CMOS-Mems Environmental Sensing Hub with Structure Designs for Performances Enhancement

Fabrication and Integration of Soc Environment Sensing Hub with Gas/Pressure/Temperature Sensors

ENVIRONMENTAL SENSING HUB ON SINGLE CHIP USING DOUBLE-SIDE POST-CMOS PROCESSES

VERTICAL INTEGRATION OF PRESSURE/HUMIDITY/TEMPERATURE SENSORS FOR CMOS-MEMS ENVIRONMENTAL SENSING HUB

Monolithically and Vertically Integrated Environmental Sensing Hub with Novel Air-Based Humidity Sensor Design

CMOS-MEMS Technologies for the Applications of Environment Sensors and Environment Sensing Hubs

Integration of infrared sensor and pressure/humidity/temperature cmos-mems environmental sensing hub by local vacuum packaging

Vertically Integrated Cmos-Mems Capacitive Humidity Sensor And A Resistive Temperature Detector For Environment Application

Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature Detection

A CMOS Temperature Sensor with Versatile Readout Scheme and High Accuracy for Multi-Sensor Systems

Monolithic Integration Of Gas/Humidity/Temperature Sensors With Thermal Coupling Effect Reduction

Crosstalk-free Hybrid Integrated Multimodal Sensor for Human Temperature, Humidity, and Pressure Monitoring

Monolithic Integrated CMOS-MEMS Fluorescence Quenching Gas Sensor and Resistive Temperature Detector (RTD) for Temperature Compensation

Integration and Encapsulation of Light-Emitting Diode and CMOS-MEMS Chips for Fluorescence Quenching Gas Sensor

Monolithic Integration of Multiple Sensors on a Single Silicon Chip

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

Performance Improvement of Integrated MEMS Temperature, Humidity, and Air Velocity Sensors for Application in Smart Buildings

Monolithic Integration of Capacitive Sensors Using A Double-Side Cmos Mems Post Process

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

Design And Implementation Of Gas Sensor Array Based On Fluorescence Quenching Detection Using Cmos-Mems Process