Optical Temperature Sensor Based on Polysilicon Waveguides

Xinru Xu,Yuexin Yin,Chunlei Sun,Lan Li,Hongtao Lin,Bo Tang,Peng Zhang,Changming Chen,Daming Zhang
DOI: https://doi.org/10.3390/s22239357
IF: 3.9
2022-01-01
Sensors
Abstract:Traditional temperature detection has limitations in terms of sensing accuracy and response time, while chip-level photoelectric sensors based on the thermo-optic effect can improve measurement sensitivity and reduce costs. This paper presents on-chip temperature sensors based on polysilicon (p-Si) waveguides. Dual-microring resonator (MRR) and asymmetric Mach–Zehnder interferometer (AMZI) sensors are demonstrated. The experimental results show that the sensitivities of the sensors based on AMZI and MRR are 86.6 pm/K and 85.7 pm/K, respectively. The temperature sensors proposed in this paper are compatible with the complementary metal-oxide-semiconductor (CMOS) fabrication technique. Benefitting from high sensitivity and a compact footprint, these sensors show great potential in the field of photonic-electronic applications.
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