Temperature sensitivity enhancement for silicon-based Mach-Zehnder interferometer with single-mask design

Yang Zhang,Jun Zou,Jian-Jun He
DOI: https://doi.org/10.1109/acp.2018.8595919
2018-01-01
Abstract:We propose a sensitivity-enhanced temperature sensor using a Mach-Zehnder Interferometer (MZI) on silicon- on-insulator (SOI) platform, with the sensitivity as high as 438pm/°C. The sensor is fabricated only by a single mask without any polymer cladding.
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