Temperature Insensitive Mach-Zehnder Interferometer on Silicon Nitride Waveguide Platform

Yu Li,Jiachen Li,Liwei Tang,Hongwei Chen,Sigang Yang,Minghua Chen

DOI: https://doi.org/10.1364/cleo_at.2019.jth2a.61

2019-01-01

Abstract:We demonstrate a temperature insensitive Mach-Zehnder interferometer (MZI) with low thermal sensitivity of 0.5 pm/K at 1560 nm. Across the wavelength range from 1525 nm to 1590 nm, the sensitivity is lower than 2 pm/K.

What problem does this paper attempt to address?

Temperature-insensitive Waveguide Sensor Using a Ring Cascaded with a Mach-Zehnder Interferometer

Yang Zhang,Jun Zou,Ziwei Cao,Jian-Jun He

DOI: https://doi.org/10.1364/ol.44.000299

IF: 3.6

2019-01-01

Optics Letters

Abstract:We demonstrate a temperature-insensitive waveguide sensor based on a silicon-on-insulator platform. The sensor consists of a ring resonator and a Mach-Zehnder interferometer (MM). A free spectral range of the sensing ring is designed to be slightly different from that of the MZI; hence, the Vernier effect can be employed to improve sensitivity. By optimizing structural parameters of the MZI, the envelope peak position of a cascaded transmission spectrum can be immune to the temperature variation, and only dependent on analyte change in the sensing area. The experimental results show that bulk refractive index (RI) sensitivity of the proposed sensor is 3552 nm/RI unit, while its temperature sensitivity is less than 4 pm/K, which is two orders of magnitude smaller than the conventional cascaded sensor structure without temperature compensation. The proposed temperature-insensitive waveguide sensor does not need polymer cladding or extra thermal stabilization, making it more robust in practical applications. (C) 2019 Optical Society of America
Temperature sensor with enhanced sensitivity based on silicon Mach-Zehnder interferometer with waveguide group index engineering.

Yang Zhang,Jun Zou,Jian-Jun He

DOI: https://doi.org/10.1364/OE.26.026057

IF: 3.8

2018-01-01

Optics Express

Abstract:We propose a highly-sensitive temperature sensor employing a Mach-Zehnder interferometer (MZI) based on silicon-on-insulator (SOI) platform. The waveguide widths in the two MZI arms are tailored to have different temperature sensitivities but nearly the same group refractive indices. A temperature sensor with an enhanced sensitivity of larger than 438pm/degrees C is experimentally demonstrated, which is over seven times larger than that of conventional silicon optical temperature sensor (about 60pm/degrees C for quasi-TM mode). Moreover, the sensor is easy to fabricate, only by a single mask, and no need of any polymer cladding, which makes it more robust, and can be used in lab-on-chip systems as a temperature monitor. (C) 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Temperature sensitivity enhancement for silicon-based Mach-Zehnder interferometer with single-mask design

Yang Zhang,Jun Zou,Jian-Jun He

DOI: https://doi.org/10.1109/acp.2018.8595919

2018-01-01

Abstract:We propose a sensitivity-enhanced temperature sensor using a Mach-Zehnder Interferometer (MZI) on silicon- on-insulator (SOI) platform, with the sensitivity as high as 438pm/°C. The sensor is fabricated only by a single mask without any polymer cladding.
Temperature-insensitive Mach-Zehnder Interferometer Based on a Silicon Nitride Waveguide Platform.

Liwei Tang,Yu Li,Jiachen Li,Sigang Yang,Hongwei Chen,Minghua Chen

DOI: https://doi.org/10.1364/ol.394143

IF: 3.6

2020-01-01

Optics Letters

Abstract:Wavelength shift, caused by temperature fluctuation, critically limits the application of photonic systems. Here, the waveguide geometry is optimized to minimize the wavelength shift due to temperature change and fabrication error. A temperature-insensitive Mach-Zehnder interferometer filter is proposed for a wavelength locker, based on a silicon nitride waveguide. The proposed device achieves a 0.6 pm/K spectral shift over the C-band, which meets the requirements of a wavelength locker for application in dense wavelength division multiplex systems.
Compact multimode waveguide based temperature-insensitive Mach-Zehnder interferometer.

Yingxuan Zhao,Chao Qiu,Aimin Wu,Yang Li,Lue Tao,Zhen Sheng,Wei Li,Xi Wang,Fuwan Gan

DOI: https://doi.org/10.1364/OE.27.020373

IF: 3.8

2019-01-01

Optics Express

Abstract:A novel multimode waveguide based Mach-Zehnder interferometer (MZI) is demonstrated on an SOI platform with the properties of compact footprint and temperatureinsensitive operation. The device can achieve a thermal dependence around 13pm/degrees C in a wavelength range of 40mn. Owing to the utilization of one single straight multimode waveguide, the device is naturally immune to local temperature distributions. The measured results exhibit transmissions with an extinction ratio better than 8dB and a minimum insertion loss lower than 0.31dB over the wavelength range of 1545nm-1585nm. Moreover, the proposed device is compatible with CMOS process. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
Ultra-Compact and Temperature-Insensitive Mach-Zehnder Interferometer Based on One Multimode Waveguide on Silicon

Huizhan Yang,Jianhao Zhang,Yuntao Zhu,Xuan Zhou,Sailing He,Liu

DOI: https://doi.org/10.1364/ol.42.000615

IF: 3.6

2017-01-01

Optics Letters

Abstract:An ultra-compact and temperature-insensitive Mach-Zehnder interferometer device is introduced on the siliconon-insulator platform. The device is constructed through one straight multimode waveguide, which consists of two densely packed silicon wires with a narrow gap of varying positions along the device. The total width of the proposed Mach-Zehnder interferometer is only about 1 mu m. Interference patterns with extinction ratios of better than 20 dB are achieved. Temperature insensitive operation of the proposed device is also demonstrated for both global and local temperature changes. The shift rate of the wavelength response with respect to the substrate temperature change is within +/- 10 pm/K in a 30 nm wavelength range. (C) 2017 Optical Society of America
Temperature-insensitive Waveguide Sensor Based on Vernier-effect

Yang Zhang,Jun Zou,Jian-Jun He

DOI: https://doi.org/10.1364/cleopr.2018.th1l.4

2018-01-01

Abstract:We proposed a temperature-insensitive sensor using cascaded microring resonator and Mach-Zehnder Interferometer (MZI) filter. Temperature sensitivity of the sensor was less than 29 pm/K in a temperature range from 20 °C to 40 °C.
Silicon nitride thermo-optic on-chip Mach-Zehnder interferometer at visible wavelengths

xiaomin wang,Peirui Ji,Shaobo Li,Fei Wang,Huiwen Deng,Shuming Yang

DOI: https://doi.org/10.1088/1361-6501/ad22ce

IF: 2.398

2024-01-26

Measurement Science and Technology

Abstract:On-chip Mach–Zehnder interferometer (MZI) is a fundamental component for many integrated systems. It holds great promise in photonic applications at visible wavelengths. This paper presents an on-chip silicon nitride thermo-optic MZI. It is capable of generating interference at a wide wavelength range in the visible spectrum, including 488 nm, 532 nm, and 633 nm. The optical transmission loss is reduced by optimizing the device architecture. This work provides new insights into the designing of integrated optics and demonstrates the potential applications of on-chip MZI in the field of visual measurement.

engineering, multidisciplinary,instruments & instrumentation
Thermal Independent Silicon-Nitride Slot Waveguide Biosensor with High Sensitivity

Xiaoguang Tu,Junfeng Song,Tsung-Yang Liow,Mi Kyoung Park,Jessie Quah Yiying,Jack Sheng Kee,Mingbin Yu,Guo-Qiang Lo

DOI: https://doi.org/10.1364/oe.20.002640

IF: 3.8

2012-01-01

Optics Express

Abstract:As the sensitivity and detection limit of photonic refractive index (RI) biosensor increases, the temperature dependence becomes a major challenge. In this paper, we present a Mach-Zehnder Interferometer (MZI) biosensor based on silicon nitride slot waveguides. The biosensor is designed for minimal temperature dependence without compromising the performance in terms of sensitivity and detection limit. With air cladding, the measured surface sensitivity and detection limit of MZI biosensor reach 7.16 nm/(ng mm(-2)) and 1.30 (pg mm(-2)), while achieving a low temperature dependence is 5.0 pm/° C. With water cladding, the measured bulk sensitivity and detection limit reach 1730(2π)/RIU and 1.29 × 10(-5) RIU respectively. By utilizing Vernier effect through cascaded MZI structures, the measured sensitivity enhancement factor is 8.38, which results in a surface detection limit of 0.155 (pg mm(-2)).
Ratiometric Wavelength Monitor Based on Mach-Zehnder Interferometer over a 80 nm Wavelength Range

Hui Zhao,Guangyi Song,Shuxin Wang,Tingting Lang,Jianjun He

DOI: https://doi.org/10.1117/12.2505121

2018-01-01

Abstract:In this paper, a ratiometric wavelength monitor at around 1550 nm based on the passive Silicon-on-Insulator (SOI) integrated device is proposed, theoretically investigated and fabricated. This monitor is made of a single Mach-Zehnder Interferometer (MZI) with direction coupler acting as edge filter. The ouput spectral response is designed to be 'X-type'. The device shows a resolution of better than 0.4 nm over the wavelength range from 1505 nm to 1585 nm with a discrimination range of 30.5 dB from 15.5 dB to -15dB, which is suitable for wavelength measurement. Based on the single mode principle, the waveguide has a 220 nmx500 nm cross section for TM-polarized mode, and the total chip size is only 18 umx20 um. In conclusion, this proposed ratiometric wavelength monitor based on a single Mach-Zehnder Interferometer on SOI platform can realize the excellent resolution over large wavelength range.
Refractive index insensitive Mach-Zehnder interferometer based on an air-clad thin-core fiber

Ziwei Feng,Chuang Wu,Zhengyong Liu,Bai-Ou Guan,Hwa Yaw Tam

DOI: https://doi.org/10.1364/apos.2016.th4a.59

2016-01-01

Abstract:We demonstrate an inline Mach-Zehnder interferometer (MZI) based on an air-clad thin-core fiber for strain and temperature sensing. The output spectrum of this MZI is insensitive to the variation of surrounding refractive index.
A Novel Mach–Zehnder Interferometric Temperature Sensor Based on a Symmetrical Double-Grooved Structure

Jie Dong,Mei Sang,Shuang Wang,Tianhua Xu,Yao Wang,Tiegen Liu

DOI: https://doi.org/10.1109/jsen.2020.3010338

IF: 4.3

2020-12-15

IEEE Sensors Journal

Abstract:In this paper, a novel temperature sensor based on the Mach-Zehnder interferometer (MZI) has been proposed and experimentally investigated. The sensor consists of a symmetrical double-grooved structure fabricated by a high-frequency pulsed CO<sub>2</sub> laser. Some key factors affecting the transmission spectrum, such as the writing depth and interference length, have been analyzed in detail. In addition, the temperature sensitivity of the sensor is obtained in theory, by analyzing the influences of the effective refractive index and the interference length on it. The experimental results demonstrate that the wavelength shifts linearly toward longer wavelength, which agrees with the theoretical analysis. The temperature sensitivity of 230 pm/°C with a linear correlation coefficient of 0.99 can be achieved in the temperature ranging from 20 °C to 90 °C. The repeatability of the sensor also is studied. Compared with traditional MZI sensors, the proposed sensor has a high temperature sensitivity. And it is suitable for temperature measurement applications.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
A Reliable Anti-Interference Temperature Sensor Based on a Four-Hole Microstructure Optical Fiber Mach-Zehnder Interferometer.

Tonglei Cheng,Wei Liu,Dianchang Song,Bin Li,Zhiyuan Yin,Xinghui Li,Huifang Wang,Xin Yan,Xuenan Zhang,Takenobu Suzuki,Yasutake Ohishi,Fang Wang

DOI: https://doi.org/10.1109/tim.2023.3287257

IF: 5.6

2023-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:In this article, an in-line Mach-Zehnder interferometer (ILMZI)-based temperature sensor of a sandwich-like composite structure was proposed and experimentally demonstrated. Using simple cleaving and splicing operations, ILMZI was formed by compactly sandwiching a section of four-hole microstructure optical fiber (FHMF) of ultrashort length between two segments of multimode fibers and single-mode fibers in turn. Due to the large thermo-optic coefficient difference between the silica and air modes in FHMF, the sensor achieves a comparable sensitivity of 67.29 pm/degrees C over a wide dynamic range of 20.8 degrees C-100.4 degrees C. Because the sensing area length is only a few hundred micrometers, the long-term stability and anti-interference of the sensor are greatly enhanced. In addition, the large airhole design confines the propagation mode in silica medium by total internal reflection, reducing the interaction between the liquid sample and the sensing element, making the sensor inert to the ambient refractive index. The maximum response deviation of the sensor under microvibration disturbances is 3.51 x 10(-4) nm/degrees C, and the maximum cross-sensitivity under strain disturbances is only 0.0018 degrees C/mu epsilon. The proposed sensor is excellent in performance, easy in fabrication, simple in structure, and low in cost, which can be expected to be used in practical temperature sensing applications without any additional packaging.
Highly sensitive temperature sensor based on an ultra-compact Mach-Zehnder interferometer with side-opened channels.

Ming Deng,Leiguang Liu,Yong Zhao,Guolu Yin,Tao Zhu

DOI: https://doi.org/10.1364/OL.42.003549

IF: 3.6

2017-01-01

Optics Letters

Abstract:We demonstrated an ultra-compact and highly sensitive temperature sensor by using an in-fiber Mach-Zehnder interferometer (MZI) with side-opened channels. The MZI was constructed by off-center splicing a thin piece of microstructured optical fiber (MOF) between two single-mode fibers. Then, two side-opened channels were drilled through the MOF along the transverse direction by using a femtosecond laser to let the liquid with a high thermo-optic coefficient enter into the air cavity of the MZI. Due to the large effective refractive index (RI) difference between the core mode and the cavity mode excited by the offset splicing point, the scale of the MOF-based MZI can be reduced to several hundred micrometers. Experimental results show that the MOF-based MZI infiltrated with isopropanol has a temperature sensitivity up to 3.8 nm/degrees C with small strain cross-sensitivity of 0.0001 degrees C/mu epsilon in the temperature range of 22 degrees C - 34 degrees C, which makes it a competitive fiber sensor in highly sensitive temperature sensing applications, including healthcare and consumer electronics. (C) 2017 Optical Society of America
High Temperature High Sensitivity Mach-Zehnder Interferometer Based on Waist-Enlarged Fiber Bitapers

Na Zhao,Qijing Lin,Weixuan Jing,Zhuangde Jiang,Zirong Wu,Kun Yao,Bian Tian,Zhongkai Zhang,Peng Shi

DOI: https://doi.org/10.1016/j.sna.2017.09.016

2017-01-01

Abstract:An optical Mach-Zehnder interferometer (MZI) composed of a short section of thin-core fiber (TCF) which inserted into a standard single-mode fiber (SMF) with two waist-enlarged bitapers was proposed for high temperature measurement. MZIs with different lengths were fabricated, and the relationship between length and interference period was studied. The fast Fourier transform (FFT) method was used to determine the transmitted spectra of MZIs, and the results indicate that LPoi and LPO2 modes are the main modes. The MZI has a high temperature sensitivity of 0.087 nm/C with a good linearity of 99.8% from 30 to 1000 degrees C. Because it has advantages of compact size, easy fabrication, high sensitivity, high mechanical strength and wide sensing range, the MZI can be used for high sensitivity temperature measurement. (C) 2017 Published by Elsevier B.V.
Simultaneous Measurement of Refractive Index and Temperature Using a Mach-Zehnder Interferometer with Forward Core-Cladding-core Recoupling

Tao Jiao,Hongyun Meng,Shuying Deng,Shuai Liu,Xianjun Wang,Zhongchao Wei,Faqiang Wang,Chunhua Tan,Xuguang Huang

DOI: https://doi.org/10.1016/j.optlastec.2018.10.047

2019-01-01

Abstract:A Mach-Zehnder interferometer based on single-mode-multimode-thin-core-single-mode fiber structure is proposed and experimentally demonstrated for measuring refractive index and temperature simultaneously. The transmission dips of the sensor will shift when the ambient refractive index and temperature change, so it is possible to measure the refractive index and temperature by monitoring the wavelength shifts of the two transmission dips due to different interference orders. The experimental results show that the sensing sensitivities of refractive index and temperature are -18.1764 nm/RIU and 0.0733 nm/RIU within the refractive index range from 1.3105 to 1.3517 and the temperature range from 25 degrees C to 50 degrees C, respectively. Its cost effectiveness, robustness and easy fabrication will have attractive potential applications in chemical and biological sensing.
A Thermally Annealed Mach-Zehnder Interferometer for High Temperature Measurement.

Zhongyao Feng,Jiacheng Li,Xueguang Qiao,Ling Li,Hangzhou Yang,Manli Hu

DOI: https://doi.org/10.3390/s140814210

IF: 3.9

2014-01-01

Sensors

Abstract:An in-fiber Mach-Zehnder interferometer (MZI) for high temperature measurement is proposed and experimentally demonstrated. The device is constructed of a piece of thin-core fiber (TCF) sandwiched between two short sections of multimode fiber (MMF), i.e., a MMF-TCF-MMF structure. A well-defined interference spectrum is obtained owing to the core-mismatch, and the interference dips are sensitive to the ambient temperature. The experimental results show that the proposed interferometer is capable of high temperature measurement up to 875 °C with a sensitivity of 92 pm/°C over repeated measurements. The explored wavelength drop point may limit the measurement range, which can be improved by repeated thermal annealing.
Demonstration of an Ultra-Sensitive Temperature Sensor Using an Asymmetric Mach-Zehnder Interferometer

Zuoqin Ding,Yaocheng Shi

DOI: https://doi.org/10.1109/jphot.2021.3098699

IF: 2.4

2021-01-01

IEEE Photonics Journal

Abstract:We present the design, fabrication and characterization of an on-chip, ultra-high sensitivity temperature sensor using asymmetric Mach-Zehnder interferometer (MZI) on silicon-on-insulator (SOI) platform. Both the group index and the sensitivity differences between two arms are considered for simultaneous sensitivity and linear range enhancement. The fabrication of the sensor only needs single lithography without introducing any high thermo-optic coefficient (TOC) materials. The experimental results demonstrate a sensitivity of 445 pm/°C from 27 °C to 67 °C, which is five times larger than a conventional all-silicon photonic temperature sensor (~80 pm/°C).
An Antiinterference Temperature Sensor Based on Mach-Zehnder Interferometer Using Kagome Hollow-Core Photonic Crystal Fiber

Qi Wang,Xiaoyu Chen,Xue Zhou,Wei Liu,Dianchang Song,Xin Yan,Xuenan Zhang,Fang Wang,Takenobu Suzuki,Yasutake Ohishi,Tonglei Cheng

DOI: https://doi.org/10.1109/jsen.2023.3255859

IF: 4.3

2023-04-18

IEEE Sensors Journal

Abstract:An antiinterference temperature sensor based on the Mach-Zehnder interferometer (MZI) is proposed, which is formed by successively fusing a homemade Kagome hollow-core photonic crystal fiber (HC-PCF) with two no-core fibers (NCFs) and two single-mode fibers (SMFs). Because of the antiresonant reflection optical waveguide properties, the interference between hollow-core mode and glass mode is achieved in Kagome HC-PCF, which significantly simplifies the overall sensing architecture and maintains better stability of the sensing signal. Using a Kagome HC-PCF length of , the maximum temperature sensitivity of the proposed sensor is obtained as 38.39 pm/°C. Meanwhile, it exhibits a low sensitivity of 0.5041 pm/ to ambient stress variation, −0.28 nm/ to curvature change, and 9.35 nm/RIU to external refractive index (RI) change. This MZI temperature sensor has the advantages of compact structure, easy fabrication, low cost, small size, high sensitivity, and antiinterference capability, which can be expected to be applied to temperature sensing in complex environments.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
High Sensitive Temperature Sensor Based on a Polymer Waveguide Integrated in an Optical Fibre Micro-Cavity

Yi Liu,Min Li,Panjuan Zhao,Xinshun Wang,Shiliang Qu

DOI: https://doi.org/10.1088/2040-8986/aa95de

IF: 2.1

2017-01-01

Journal of Optics

Abstract:A Mach–Zehnder interferometer (MZI) based on a polymer waveguide integrated in an optical fibre micro-cavity was proposed. The micro-cavity with two symmetric openings was fabricated in single mode fibre by using femtosecond laser micromachining and fibre splicing. Then, the polymer waveguide with a length of 70 μm was integrated into the micro-cavity by using a two-photon polymerization fabrication method. The MZI exhibited a perfect interference spectrum with a fringe visibility of almost 25 dB. Owing to the high thermo-optical coefficient of the polymer material, the temperature sensitivity of the proposed MZI reached 447 pm/°C. Meanwhile, it can be used as a reliable temperature sensor as its perfect linearity (99.7%) and repeatability.

Temperature Insensitive Mach-Zehnder Interferometer on Silicon Nitride Waveguide Platform

Temperature-insensitive Waveguide Sensor Using a Ring Cascaded with a Mach-Zehnder Interferometer

Temperature sensor with enhanced sensitivity based on silicon Mach-Zehnder interferometer with waveguide group index engineering.

Temperature sensitivity enhancement for silicon-based Mach-Zehnder interferometer with single-mask design

Temperature-insensitive Mach-Zehnder Interferometer Based on a Silicon Nitride Waveguide Platform.

Compact multimode waveguide based temperature-insensitive Mach-Zehnder interferometer.

Ultra-Compact and Temperature-Insensitive Mach-Zehnder Interferometer Based on One Multimode Waveguide on Silicon

Temperature-insensitive Waveguide Sensor Based on Vernier-effect

Silicon nitride thermo-optic on-chip Mach-Zehnder interferometer at visible wavelengths

Thermal Independent Silicon-Nitride Slot Waveguide Biosensor with High Sensitivity

Ratiometric Wavelength Monitor Based on Mach-Zehnder Interferometer over a 80 nm Wavelength Range

Refractive index insensitive Mach-Zehnder interferometer based on an air-clad thin-core fiber

A Novel Mach–Zehnder Interferometric Temperature Sensor Based on a Symmetrical Double-Grooved Structure

A Reliable Anti-Interference Temperature Sensor Based on a Four-Hole Microstructure Optical Fiber Mach-Zehnder Interferometer.

Highly sensitive temperature sensor based on an ultra-compact Mach-Zehnder interferometer with side-opened channels.

High Temperature High Sensitivity Mach-Zehnder Interferometer Based on Waist-Enlarged Fiber Bitapers

Simultaneous Measurement of Refractive Index and Temperature Using a Mach-Zehnder Interferometer with Forward Core-Cladding-core Recoupling

A Thermally Annealed Mach-Zehnder Interferometer for High Temperature Measurement.

Demonstration of an Ultra-Sensitive Temperature Sensor Using an Asymmetric Mach-Zehnder Interferometer

An Antiinterference Temperature Sensor Based on Mach-Zehnder Interferometer Using Kagome Hollow-Core Photonic Crystal Fiber

High Sensitive Temperature Sensor Based on a Polymer Waveguide Integrated in an Optical Fibre Micro-Cavity