Abstract:By utilizing embedded micro‐heaters for post‐deposition annealing, metal oxide grain size and gas responses of adjacent sensors in the same substrate can be controlled without further fabrication steps. The proposed dual FET‐type gas sensors with on‐chip annealing can directly determine the gas concentration in a mixed gas environment, introducing a new approach for a real‐time energy‐efficient gas sensing system. The demand for gas sensing systems that enable fast and precise gas recognition is growing rapidly. However, substantial challenges arise from the complex fabrication process of sensor arrays, time‐consuming data transmission to an external processor, and high energy consumption in multi‐stage data processing. In this study, a gas sensing system using on‐chip annealing for fast and power‐efficient gas detection is proposed. By utilizing a micro‐heater embedded in the gas sensor, the sensing material of adjacent sensors in the same substrate can be easily varied without further fabrication steps. The response to oxidizing gas is constrained in metal oxide (MOX) sensing material with small grain sizes, as the depletion width of grain cannot extend beyond the grain size during the gas reaction. On the other hand, the response to reducing gases and humidity, which decrease the depletion width, is less affected by grain sizes. A readout circuit integrating a differential amplifier and dual FET‐type gas sensors effectively emphasizes the response to oxidizing gases by canceling the response to reducing gases and humidity. The selective on‐chip annealing method is applicable to various MOX sensing materials, demonstrating its potential for application in commercial fields due to its simplicity and expandability.

Reliability of FET-type gas sensor with asymmetric air-gap micro-heater structure considering thermoelectric effect

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

Improved Performance of FET-Type Humidity Sensor With Low-Power Embedded Micro-Heater

Proposition of optimal self-curing method in horizontal-floating gate FET-type gas sensors for reliability improvement

On‐Chip Annealing Using Embedded Micro‐Heater for Highly Sensitive and Selective Gas Detection

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Thermal Analysis and Design of A Micro-Hotplate for Sisubstrated Micro-Structural Gas Sensor

Design, Simulation, and Performance Evaluation of a High Temperature and Low Power Consumption Microheater Structure for MOS Gas Sensors

Non-Silicon MEMS Calorimetric Gas Flow Sensor

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

High Performance Bidirectional Thermal Gas Flow Sensor of (100) Silicon Single-Sided Fabrication by 45-Tilted Dicing

Thermal Modeling of Low Power Micromachined Solid State Integrated Gas Sensor

Fabrication of a Flexible, Wireless Micro-Heater on Elastomer for Wearable Gas Sensor Applications

Extended-Gate Structure for Carbon-Based Field Effect Transistor Type Formaldehyde Gas Sensor

From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

Tunnel-field-effect-transistor based gas-sensor: Introducing gas detection with a quantum-mechanical transducer

A High Heat Transfer Efficiency MEMS Thermal Conductivity Gas Sensor with Bridge Structure for Hydrogen Detection

Characterization of a Novel Microhotplate for Application in a Silicon-Based Nanofilm Gas Sensor

An Experimental Study on High-Temperature Metallization for Micro-Hotplate-Based Integrated Gas Sensors

Evolution of surface and interface in soluble acene/polymer blends and its critical effects on gas diffusion dynamics in gas sensors

Study on the Characteristics of Thermo-Electrodes of Various Deposition Parameters for the Flexible Temperature Sensor.