Abstract:Heating plays a vital role in science, engineering, mining, and space, where heating can be achieved via electrical, induction, infrared, or microwave radiation. For fast switching and continuous applications, hotplate or Peltier elements can be employed. However, due to bulkiness, they are ineffective for portable applications or operation at remote locations. Miniaturization of heaters reduces power consumption and bulkiness, enhances the thermal response, and integrates with several sensors or microfluidic chips. The microheater has a thickness of ~ 100 nm to ~ 100 μm and offers a temperature range up to 1900℃ with precise control. In recent years, due to the escalating demand for flexible electronics, thin-film microheaters have emerged as an imperative research area. This review provides an overview of recent advancements in microheater as well as analyses different microheater designs, materials, fabrication, and temperature control. In addition, the applications of microheaters in gas sensing, biological, and electrical and mechanical sectors are emphasized. Moreover, the maximum temperature, voltage, power consumption, response time, and heating rate of each microheater are tabulated. Finally, we addressed the specific key considerations for designing and fabricating a microheater as well as the importance of microheater integration in COVID-19 diagnostic kits. This review thereby provides general guidelines to researchers to integrate microheater in micro-electromechanical systems (MEMS), which may pave the way for developing rapid and large-scale SARS-CoV-2 diagnostic kits in resource-constrained clinical or home-based environments.

Design, Simulation, and Performance Evaluation of a High Temperature and Low Power Consumption Microheater Structure for MOS Gas Sensors

An Ultra Low Power Consumption Methane Gas Detector Based on an Optimized Suspended Membrane Microhotplate

Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

MEMS based metal oxide semiconductor carbon dioxide gas sensor

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

Optimization of a Low-Power Chemoresistive Gas Sensor: Predictive Thermal Modelling and Mechanical Failure Analysis

Study on a Low Power and High Efficiency Micro Heater Used in Μpcr Chip

Reliability of FET-type gas sensor with asymmetric air-gap micro-heater structure considering thermoelectric effect

Microheater: material, design, fabrication, temperature control, and applications-a role in COVID-19

Silicon Microheater Based Low-Power Full-Range Methane Sensing Device

From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

Low Power Perforated Membrane Microheater

Design and Modeling of Vanadium Dioxide-Based High-Sensitivity Microfluidic Calorimetric Sensors

Thermal Conductivity Gas Sensors for High-Temperature Applications

Non-Silicon MEMS Calorimetric Gas Flow Sensor

Fabrication of a Flexible, Wireless Micro-Heater on Elastomer for Wearable Gas Sensor Applications

A High Heat Transfer Efficiency MEMS Thermal Conductivity Gas Sensor with Bridge Structure for Hydrogen Detection

An Experimental Study on High-Temperature Metallization for Micro-Hotplate-Based Integrated Gas Sensors