Thermal Conductivity Gas Sensors for High-Temperature Applications

Nikolay Samotaev,Boris Podlepetsky,Mikhail Mashinin,Igor Ivanov,Ivan Obraztsov,Konstantin Oblov,Pavel Dzhumaev

DOI: https://doi.org/10.3390/mi15010138

IF: 3.4

2024-01-17

Micromachines

Abstract:This paper describes a fast and flexible microfabrication method for thermal conductivity gas sensors useful in high-temperature applications. The key parts of the sensor, the microheater and the package, were fabricated from glass-coated platinum wire and the combination of laser micromilling (ablation) of already-sintered monolithic ceramic materials and thick-film screen-printing technologies. The final thermal conductivity gas sensor was fabricated in the form of a complete MEMS device in a metal ceramic package, which could be used as a compact miniaturized surface-mounted device for soldering to standard PCB. Functional test results of the manufactured sensor are presented, demonstrating their full suitability for gas sensing applications and indicating that the obtained parameters are at a level comparable to those of standard industrially produced sensors. The results of the design and optimization principles of applied methods are discussed with regard to possible wider applications in thermal gas sensor prototyping in the future. The advantage of the developed sensors is their ability to operate in air environments under high temperatures of 900 °C and above. The sensor element material and package metallization were insensitive to oxidation compared with classical sensor-solution-based metal–glass packages and silicone MEMS membranes, which exhibit mechanical stress at temperatures above 700 °C.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

### Problems Addressed by the Paper

The paper primarily aims to address the design and manufacturing issues of thermal conductivity gas sensors in high-temperature environments. Specifically:

1. **Design and Manufacturing Methods**: A rapid and flexible microfabrication method is proposed to create thermal conductivity gas sensors suitable for high-temperature applications. The key components of the sensor (microheater and packaging) are made of glass-coated platinum wire, combining laser micromachining (removal of sintered ceramic materials) and thick-film printing technology.

2. **Material Selection and Packaging**: The materials used in the study include alumina, platinum, silver, gold, and glass. The stability and reproducibility of these materials in high-temperature processes (up to 1000°C) have been verified. The platinum wire heater exhibits high stability, and its glass coating prevents the platinum from reacting with the environment, maintaining the stability of the thermoelectric parameters.

3. **High-Temperature Adaptability**: The developed sensor can withstand temperatures above 900°C in an air environment. The sensor element materials and the metallized parts of the packaging are insensitive to oxidation, showing better performance at temperatures above 700°C compared to traditional metal-glass packaging and silicon MEMS membranes.

Through these improvements, the paper aims to demonstrate a novel thermal conductivity gas sensor that can reliably operate under extreme high-temperature conditions, with good reproducibility and stability.