Abstract:Often, extreme working environments with temperatures exceeding 800 °C result in the failure of conventional sensors. Recently, ceramic-based microwave backscattering wireless passive high-temperature sensors have emerged as viable alternatives. Typically, waveguide transmission lines-integral components of these sensors-are fabricated on ceramic substrates using 3-D manufacturing techniques such as drilling and metal backfilling; nevertheless, tolerances in drilling and backfilling are unavoidable. These tolerances are further aggravated by nonreversible pore expansion at extremely high temperatures and may lead to sensor cracking or complete failure. In the present study, we introduce a metamaterial high-temperature sensor that uses an all-planar substrate-integrated waveguide. The sensor’s components are manufactured on alumina ceramic substrates exclusively through screen-printing, obviating the need for drilling. This approach effectively circumvents issues related to pore-induced errors or failures and offers the advantages of ease of fabrication and cost-effectiveness. For sensing, a single square complementary split resonant ring (S-CSRR) serves as the metamaterial resonator, providing the requisite temperature sensitivity. In the antenna segment, a coplanar waveguide-fed monopole antenna with a bandwidth of 2.3 GHz is employed. Three types of metal slurry, Ag, PtRh10, and Pt, are used in sensor fabrication, rendering them suitable for maximum measurement temperatures of 800 °C, 1200 °C, and 1600 °C, respectively. The average temperature sensitivities for these three sensors are 236, 220, and 191 kHz/°C, respectively. The proposed sensor, characterized by high integration, simplified processing, reduced fabrication costs, and a high ${Q}$ -factor, holds significant application potential in industries such as aerospace, steel metallurgy, and energy mining.

An Experimental Study on High-Temperature Metallization for Micro-Hotplate-Based Integrated Gas Sensors

Design, Simulation, and Fabrication of Multilayer Al2O3 Ceramic Micro-Hotplates for High Temperature Gas Sensors

Thermal Conductivity Gas Sensors for High-Temperature Applications

High temperature pressure sensor using a thermostable electrode

Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications—Towards the CMOS-MEMS Monolithic Approach

Design and Fabrication of MOS Type Gas Sensor with Vertically Integrated Heater Using CMOS-MEMS Technology

Non-Silicon MEMS Calorimetric Gas Flow Sensor

Metamaterial High–Temperature Sensor Based on All–Planar Substrate Integrated Waveguide

Design and Modeling of Micromechanical GaAs based Hot Plate for Gas Sensors

Printing Three‐Dimensional Refractory Metal Patterns in Ambient Air: Toward High Temperature Sensors

Silicon on Insulator Pressure Sensor Based on A Thermostable Electrode for High Temperature Applications

Heater Topology Influence on the Functional Characteristics of Thin-Film Gas Sensors Made by MEMS-Silicon Technology

Pt thin-film resistance thermo detectors with stable interfaces for potential integration in SiC high-temperature pressure sensors

Design and Experimentation with Sandwich Microstructure for Catalytic Combustion-Type Gas Sensors

Surface Acoustic Wave Sensors for Wireless Temperature Measurements above 1200 Degree Celsius

Design and Fabrication of Micro-Nano Fusion Gas Sensor Based on Two-Beam Micro-Hotplatform

From Ceramic Tube to Microcantilever: A New Strategy for Low Power, Fast Heating and High Integrated Metal Oxide Semiconductor Gas Sensor

Preparation and Performance Evaluation of a Miniature High-Temperature Heat Flux Sensor With Centralized Thermal Insulation Structure

Exploring the nonlinear piezoresistive effect of 4H-SiC and developing MEMS pressure sensors for extreme environments

Monolithic Integrated Cmos-Mems Mos Type Gas Sensor And Novel Heater For Sensitivity And Power Consumption Enhancement

Low Concentration CO Gas Sensor Based on Pulsed-Heating and Wafer-Level Fabricated MEMS Hotplate