Substrate-mediated Multiwave Resonance Grazing Incidence X-Ray Diffraction in Thin Films: A Method for Direct Phase Determination

Yi-Shan Huang,C.W. Chao,Yuri P. Stetsko,Yen-Ru Lee,Chia-Hung Ching,Cheng‐Yuan Hung,Gang-Yi Lin,Tsung-Chieh Lin,Shih‐Lin Chang
DOI: https://doi.org/10.1103/physrevb.64.085406
2001-01-01
Abstract:Direct phase determination of surface in-plane reflection is realized for thin films on substrates by using substrate reflections as an intermediary to enhance the coherent interaction in resonant multiwave grazing incidence diffraction in thin films. The coupling of the in-plane diffracted waves at the interface between the thin film and the substrate is essential. The intensity variation due to this enhanced interaction/coupling becomes clearly visible, thus leading to unambiguous phase determination. This opens a different way for direct phase determination of surface reflections in thin films.
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