Abstract:Many nano and quantum devices, with their sizes often spanning from millimeters down to sub-nanometer, have intricate low-dimensional, non-uniform, or hierarchical structures on surfaces and interfaces. Since their functionalities are dependent on these structures, high-resolution surface-sensitive characterization becomes imperative to gain a comprehensive understanding of the function-structure relationship. We thus developed hard X-ray ptychographic reflectometry imaging, a new technique that merges the high-resolution two-dimensional imaging capabilities of hard X-ray ptychography for extended objects, with the high-resolution depth profiling capabilities of X-ray reflectivity for layered structures. The synergy of these two methods fully leverages both amplitude and phase information from ptychography reconstruction to not only reveal surface topography and localized structures such as shapes and electron densities, but also yields statistical details such as interfacial roughness that is not readily accessible through coherent imaging solely. The hard X-ray ptychographic reflectometry imaging is well-suited for three-dimensional imaging of mesoscopic samples, particularly those comprising planar or layered nanostructures on opaque supports, and could also offer a high-resolution surface metrology and defect analysis on semiconductor devices such as integrated nanocircuits and lithographic photomasks for microchip fabrications.

Time-resolved reflection surface x-ray diffraction

Reflection Surface X-Ray Diffraction Patterns: K-Space Images

X-ray reflectivity with a twist: quantitative time-resolved X-ray reflectivity using monochromatic synchrotron radiation

Three-Wave Resonance Grazing Incidence X-Ray Diffraction: A Novel Method for Direct Phase Determination of Surface In-Plane Reflections

Three-dimensional coherent X-ray surface scattering imaging near total external reflection

Ultrafast Time Resolved X-Ray Diffraction, Extended X-Ray Absorption Fine Structure And X-Ray Absorption Near Edge Structure

Ultrafast Structural Dynamics Studied by Kilohertz Time-Resolved X-Ray Diffraction

High-speed X-ray Diffraction for Studying Irreversible Materials Structure Dynamics

High-Resolution Scanning X-ray Diffraction Microscopy

Three-dimensional Hard X-ray Ptychographic Reflectometry Imaging on Extended Mesoscopic Surface Structures

Monitoring growth with X-ray diffraction

Ultrafast Structural Dynamics Using Time-Resolved X-Ray Diffraction Driven by Relativistic Laser Pulses

Realizing In-Plane Surface Diffraction by X-Ray Multiple-Beam Diffraction with Large Incidence Angle

High-resolution ab initio three-dimensional X-ray diffraction microscopy

Reflection High-Energy Electron Diffraction Measurements of Reciprocal Space Structure of 2D Materials

Quantitative disentanglement of coherent and incoherent laser-induced surface deformations by time-resolved x-ray reflectivity

X-ray scattering from surfaces: discrete and continuous components of roughness

Recent progress in application of surface X-ray scattering techniques to soft interfacial films

High-speed scanning tunneling microscope technique and its application in studying structural dynamics on surfaces

Substrate-mediated Multiwave Resonance Grazing Incidence X-Ray Diffraction in Thin Films: A Method for Direct Phase Determination

Experimental Study on Soft X-Ray Diffraction of a Two-Dimensional Array