Abstract:To enhance the reflectivity of X-ray mirrors beyond the critical angle, multilayer coatings are required. Interface imperfections in the multilayer growth process are known to cause non-specular scattering and degrade the mirror optical performance; therefore, it is important to predict the amount of X-ray scattering from the rough topography of the outer surface of the coating, which can be directly measured, e.g., with an Atomic Force Microscope (AFM). This kind of characterization, combined with X-ray reflectivity measurements to assess the deep multilayer stack structure, can be used to model the layer roughening during the growth process via a well-known roughness evolution model. In this work, X-ray scattering measurements are performed and compared with simulations obtained from the modeled interfacial Power Spectral Densities (PSDs) and the modeled Crossed Spectral Densities for all the couples of interfaces. We already used this approach in a previous work for periodic multilayers; we now show how this method can be extended to graded multilayers. The upgraded code is validated for both periodic and graded multilayers, with a good accord between experimental data and model findings. Doing this, different kind of defects observed in AFM scans are included in the PSD analysis. The subsequent data-model comparison enables us to recognize them as surface contamination or interfacial defects that contribute to the X-ray scattering of the multilayer.

X-ray scattering from surfaces: discrete and continuous components of roughness

Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

Crystal truncation rods from miscut surfaces

Correlated Diffuse X-ray Scattering from Periodically Nano-Structured Surfaces

X-ray Scattering from a Rough Surface and Damaged Layer of Polished Wafers

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

X-ray diffraction studies of miscut crystal surfaces and overlayers: a dynamical diffraction approach

Reflection Surface X-Ray Diffraction Patterns: K-Space Images

Light Scattering For Testing Roughness Of Formed Surfwees

Laser scattering on aluminum surfaces with random and periodic height distributions

Monitoring growth with X-ray diffraction

X-ray scattering of periodic and graded multilayers: comparison of experiments to simulations from surface microroughness characterization

Effects of surface roughness on light scattering by small particles

Time-resolved reflection surface x-ray diffraction

Crystal Truncation Rods from Miscut Surfaces with Alternating Terminations

Multifractal analysis of the spatial distribution of the film surfaces with different roughening mechanisms

Dynamical-Approach for X-Ray-Diffraction from Surfaces and Interfaces - Interpretation of Crystal Truncation Rod Using Dynamical Theory

Investigating liquid surfaces down to the nanometer scale using grazing incidence x-ray scattering

Atomistic wave packet investigation of phonon scattering at rough surfaces

Reconstruction of a heterogeneous fractal surface profile from scattering measurements at low grazing incidence

In-situ quantification of the surface roughness for facile fabrications of atomically smooth thin films