Abstract:Mirror-finished surface products have a wide range of applications in different engineering industries, such as power generation, aerospace, semiconductors and optics. The surface topography of mirror-finished products is typically measured in a metrology laboratory, which is typically time consuming and cannot be integrated into the manufacturing process. To allow for in-situ product quality assurance and automatic tool change for manufacturing processes, a more accurate and responsive surface-measurement method is needed. For highly polished surfaces, a sub-micron surface fluctuation makes it possible to use light-scattering effects and image processing for surface texture analysis. A non-contact surface inspection system using a fringe-patterned illumination method is proposed in this paper. A predesigned pattern was projected onto the target surface, and its reflected image was captured by a camera. It was found that the surface parameters Sa and Sq, which are widely used to evaluate surface quality, are significantly correlated with luminous-intensity distribution. Another parameter, Str, which quantifies the uniformity of surface-texture directions due to polishing or grinding marks, was traditionally quantified after a complete-surface topographic measurement. In this research, a new approach is proposed to determine surface isotropy through a luminance-intensity distribution analysis. By rotating the test coupon, the variation of specular reflection showed correlation with the significance of surface-texture direction. The experimental results demonstrate that mirror-finished surfaces with a large deviation in luminance intensity across the pattern possess low Str values, which indicates low uniformity in surface texture.

Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

Experimental Research of Bidirectional Reflectance Distribution Functions of Target Surfaces with Different Roughness

In-process Measuring Surface Roughness by Using Light Scattering Theory

Light Scattering For Testing Roughness Of Formed Surfwees

Quantitative Characterization of Supersmooth Surface with Roughness in the Sub-Nanometer Range

Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination

Ultraviolet bidirectional reflectance distribution function measurement and analysis of typical roughness surface

Remote measurement of surface roughness, surface reflectance, and body reflectance with LiDAR

Real-Time Measurement of Surface Roughness Based on Dynamic Speckles

Measurement and Analysis of Surface Profiles by Optical Scattering Method

Laser scattering on aluminum surfaces with random and periodic height distributions

Real Time Measurement of Surface Roughness Using Laser Technique

The Laser Scattering of Aluminum Surfaces with Random and Periodic Roughness Distribution

Polarized Light Scattering of Particle above a Surface and Surface Microroughness

Measurement Of Surface Roughness By Reflected Interference Spectrum

Bidirectional Reflectance Distribution Function (BRDF) Measurements, Modeling and Applications in Space-Agile Tx/Rx Common Aperture System

Progress of Surface Roughness Measurement Based on Optical Method

Reflective properties of randomly rough surfaces under large incidence angles.

Comparison Of Optical Surface Roughness Measured By Stylus Profiler, Afm And White Light Interferometer Using Power Spectral Density

Method for Surface Quality Inspection Based on Total Scattering Measurement

Measurement of Surface Scattering Characteristics of Black Materials in Thomson Scattering System