A Survey of the Research on Surface Roughness Measuring Development and Method

Chen JItao

2007-01-01

Abstract:The surface roughness is an important target of reflecting the microscopic shape of components surface, it has great influence on the surface quantity of work piece. Based on the development of surface roughness measuring method, its present condition of research, especially optical measurement, is discussed ind etails.

What problem does this paper attempt to address?

Survey of measurement methods for surface roughness

Bin Liu,Qi-bo FENG,Cui-fang KUANG

DOI: https://doi.org/10.3969/j.issn.1005-5630.2004.05.012

2004-01-01

Abstract:Surface roughness is an important parameter to reflect the micro-geometry in machine process, and also an important part of modern precise measurement technique. Contact measurement and noncontact measurement was summarized in this paper, and the advantages and disadvantages are disucssed. Some ideas about it's trend are given in the end.
Surface Roughness Evaluation By Using Wavelets Analysis

Qinghu Chen,Shunian Yang,Zhu Li

DOI: https://doi.org/10.1016/S0141-6359(99)00013-6

1999-01-01

Abstract:Based upon wavelets theory, a novel reference for evaluating surface roughness is proposed here, wherein the surface roughness can be separated from the actual surface profile f(t). Some examples have shown that more precise evaluation results could have been achieved than those found using classical reference lines. (C) 1999 Elsevier Science Inc. All rights reserved.
Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

ZR Zheng,ZP Yu,XT Sun,J Zhou,PF Gu

IF: 0.6

2010-01-01

Optica Applicata

Abstract:Light scattering from micro-rough surface is discussed firstly in this paper, then the relationship of BRDF(Bidirectional Reflectance Distribution Function) of light scattering from micro-rough surface with TIS(Total Integrated Scattering) is analyzed. Moreover, roughness statistical characterization such as RMS(Root Mean Square roughness), PSD(Power Spectral Density function) are deduced by TIS(total integrated scattering) of polished surface. And, an automatic measure system of light scattering with one dimensional scanning method is introduced, the layout of system and optical sub-system are illuminated. Based on the light scattering measurements system, BRDF of two kind of polished surfaces (silica surface and Ag reflector) have been tested, and PSD of two surfaces have been given by light scattering measurements, roughness characterization of two surfaces have been compared with the tested data by profile mete. Result shows that light scattering measurement method has high precision on nondestructive measurement for polishing surfaces.
Leaf surface roughness measure based on shape from focus

Zeqing Zhang,Fei Liu,Zhenjiang Zhou,Yong He,Hui Fang

DOI: https://doi.org/10.21203/rs.3.rs-138510/v1

2021-01-01

Abstract:Abstract BackgroundSurface roughness has a significant effect on leaf wettability, consequently influencing the efficiency and effectiveness of pesticide spraying application. Therefore, surface roughness measure of plant leaves is conducive to relevant researches. In order to characterize the surface roughness, present methods have to draw support from large apparatus, but they are generally high-cost and not portable enough for field measurement. Methods those instruments even have potentially inherent drawback such as absence of relation between pixel intensity and corresponding height for scanning electron microscope (SEM). ResultsAn imaging system with variable object distance is set up to capture images of plant leaves and a shape from focus (SFF) based method is proposed. These space-variantly blurred images are processed with the proposed algorithm to yield surface roughness of plant leaves. The algorithm mainly improves the current SFF method in image alignment, focus distortion correction, and NaN values introducing to make it applicative for precise 3d-reconstruction and surface roughness measure in small scale. ConclusionCompared with method via optical three-dimensional interference microscope, the proposed method preserves the overall topography of leaf surface and meanwhile achieves superior cost performance. Experiments on standard gauge blocks revealed the RMSE of step was approximately 4.44μm. Furthermore, the focus measure operator SML was supposed to perform best according to Friedman/Nemenyi test.
A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Yongrong Yang

2004-01-01

Abstract:The described optical system,which is used to measure the roughness of ultra smooth surface,forms a common-path interference,so a nondestructive detection can be carried out by it without standard reference plane.In consequence of the way that the optical interference sensor is moved rather than the specimen while measuring,the system can be used to measure the optical component in great dimension.The lateral resolution of measurement system is 0.5μm,and the vertical one is 0.1nm.The repeatability of the system is better than 2%.
Design of New Type Portable 3D Roughness Measuring Instrument

PAN Xiao-bin,TANG Ya-ming,YOU Zu-sheng,ZHOU Xiao-jun

DOI: https://doi.org/10.3969/j.issn.1005-2895.2011.03.017

2011-01-01

Abstract:Based on the analysis of the traditional two-D surface roughness measuring instrument,combined with the development tendency of 3-D surface measuring,a kind of portable surface roughness measuring instrument was designed.It can realize precise scan with Y axis and quickly position the work-piece to measure location as well as simple adjustment.It can realize 3-D measuring roughness and evaluation of plane and rotary surface.It is small,portable and practical.
Study on the Influence of Roughness on the Detection for Mechanical Characteristics of the Machined Surface by Surface Acoustic Wave Dispersion Theory

Jing Lei Xu,Bin Lin,Ya Xu Wei

DOI: https://doi.org/10.4028/www.scientific.net/kem.693.1447

2016-01-01

Key Engineering Materials

Abstract:The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical characteristics of the precision-machined surface. The paper is concerned with the effect of the roughness of the machined surface on the dispersion of surface acoustic waves propagating in the precision-machined surface which indicates mechanical characteristics of the machined surface. The finite element method (FEM) is employed by establishing a series of models with different roughness Ra value to analyze influences from different roughness Ra value on surface acoustic wave dispersion. The models are established by applying a combined method based on fractal theory and wavelet analysis. The simulation results showed that the roughness of machined surface will cause the dispersion of surface acoustic wave propagation, the effect varies with the different roughness Ra values. A critical Ra value influencing on the surface acoustic wave propagation exists. Accordingly, that the factor of roughness should be considered in advance or not, the situation can be determined through studying and determining the critical roughness Ra value above mentioned. Consequently, the study has the important meaning regarding the detection for mechanical characteristics of the machined surface.
Design of Surface Roughness Measurement Bench Based on Stewart Platform

Xiaobin Pan,Yaming Tang,Xiaojun Zhou

DOI: https://doi.org/10.4028/www.scientific.net/amm.37-38.335

2010-01-01

Applied Mechanics and Materials

Abstract:This paper designed a type of freeform surface roughness measurement bench using parallel-mechanism. The virtual prototype of surface roughness measurement bench has been established. Basic structure parameters and work-space of bench have been calculated according to the program of surface roughness test. An example of bearing outer circle roughness measurement based on Stewart platform has been analysed. From the example of measurement bench it is observed that the designed bench based on Stewart platform can be used as a multi-DOF structure in the freeform surface roughness measurement.
Measurement of Aspheric Surface

朱勇建 Zhu Yongjian,潘卫清 Pan Weiqing

DOI: https://doi.org/10.3788/LOP47.011202

2010-01-01

Laser & Optoelectronics Progress

Abstract:Aspheric technologies have been introduced widely into numerous areas such as camera,cell phone,DVD,communications,astronomy,military affairs and so on because of its high image quality,compact volume and light weight.In aspheric technologies,a key problem is to test the aspheric surface.The probe-contacting method is the earliest one and has become more and more mature,but it couldn't find a trade-off between high accuracy and high efficiency.The non-contacting methods have also been developed for almost 40 years and many different kinds of non-contacting styles are found.However,it's still difficult to realize high accuracy and efficiency at the same time by using a non-contacting technology.With the development of aspheric manufacturing,it becomes more urgent to reach the goal of high accuracy in an extremely-short time.According to different testing principles,most popular aspheric testing technologies have been discussed and compared in details and their own advantages and disadvantages have been set forth.In the end,the developing directions of aspheric surface testing have been pointed out.
A Study on 3D Micro-Topographical Measurement of FRCMC Grinding Surface

Xiaoyan Cao,Bin Lin,Yan Wang,Shaolei Wang

DOI: https://doi.org/10.1115/imece2013-62366

2013-01-01

Abstract:Fiber-reinforced ceramic matrix composites (FRCMCs) have potential applications in aerospace and other high-tech fields. Meanwhile, it is significant to evaluate the grinding surface quality of FRCMCs. But according to FRCMCs’ anisotropic and non-homogeneous structure, it is difficult to evaluatethe surface quality with the traditionalmeasuring method used in metal material. The present paper studied the 3D micro-topographical measurement and evaluationfrom a new perspective. The research is based on some new discovery that the material enhanced fiber orientation played key role in micro-topographical of FRCMC grinding surface. Using a non-contact optical measurement instrument, the method was developed on 2.5D SiO2/SiO2 composite. Through a series of measuring experiments, we found that both starting position of measurement and sampling conditions affected on the measurement results. This paper recommendedoptimization measurement parameter valuesof sampling conditions, and also analyzedcharacteristics of the RCMC grinding surface topography on amplitude, wave distribution and surface supportcharacteristics in details. The results show that the optimal range of sampling interval is 40 μm to 70 μm, the range of sampling area is better more than 64mm2 and the range of sampling speed is 8 to 14mm/s. The measurement of surface topography is the bridge framed between the manufacture and parts performance, so theresearchobtained will be an important technical support on improvingthe processing quality of FRCMC.
Real Time Measurement of Surface Roughness Using Laser Technique

LUO Jianbin,WANG Wen,Patrick,P.L.Wong,WEN Shizhu

DOI: https://doi.org/10.3321/j.issn:1000-0054.1999.02.002

1999-01-01

Abstract:A discussion about recently developed methods for measuring the roughness of the dynamic surface in process has been taken. In order to overcome disadvantages of the present methods, a new technique using dark region ratio of the reflected laser to determine the dynamic surface roughness is proposed. The measuring range of surface roughness is from 0.05μm to 1.6μm or from 0.4μm to 12.5μm which is related to the reflected initial average optical intensity. The influence factors such as speed, initial optical intensity on the dark region ratio have been discussed. The measuring results are very close to that measured by Telyer soft.
Nanometer Scale Roughness Measurements with Atomic Force Microscopes

陈英飞,章海军,张冬仙

DOI: https://doi.org/10.3969/j.issn.1005-5630.2003.04.005

2003-01-01

Abstract:A system of atomic force microscope applied to nanometer scale surface roughness measuring is introduced, and the emphasis is laid on software implementation method. The experiment results show that the system can be well used to measure 1-D surface roughness of a line in random horizontal or vertical direction and the surface roughness of random area. The three dimensional spatial measuring resolution of surface roughness has reached nanometer scale, which will satisfy the need of nanometer scale surface topography research very well.
A new optical technique for roughness measurement on moving surface

W. Wang,P. L. Wong,J. B. Luo,Z. Zhang

DOI: https://doi.org/10.1016/S0301-679X(98)00034-6

IF: 5.62

1998-01-01

Tribology International

Abstract:A new optical technique which allows the roughness of moving surfaces to be determined was developed. The new technique which is called the dark/bright ratio (DBR) method utilizes the combined effects of speckle and scattering phenomena. The roughness of surfaces is inferred from the dimensions of the recorded dark or bright area in the speckle pattern. Although it is a relative method, it has great potential to be used for in-process measurement and automation owing to the simplicity of both its principle and required optical set-up. The new technique has also been proved to have large measuring range and with high precision, The principle of this technique and the set-up of the measuring system are described. Experimental results for both static and dynamic conditions, which were compared to those obtained using the traditional stylus technique, were found to be in good agreement. The reliability of the new technique in obtaining roughness data of surfaces under various speed conditions (from 0 to 0.017 m/s) was validated. (C) 1998 Elsevier Science Ltd. All rights reserved.
Measurement of Device Surface Profile and Roughness

LI Xi-de,SHI Hui-Ji

2006-01-01

Abstract:The important methods on the measurement of surface height fluctuation,ranged from millimeter to sub-nanometer,are introduced with the parameters of profile and roughness based on the optical and scanning microscopic techniques.Topics include the structured light intensity pattern profilometry,the coherence profilometry,as well as the optical scattering and microscopic scanning methods which are applicable to the height fluctuations from centimeters to micrometers,from millimeters to sub-micrometers and from sub-micrometers to sub-nanometers respectively.The characterization mode and measured parameters in various height scales are discussed.Finally,the stress corrosion experiments are carried out to test the roughness change of an aluminum alloy(roughness change from 0.025μm to 0.7μm) and the relationship between the surface roughness and the temperature of the corrosion solution and corrosion time is presented using local speckle intensity average and speckle autocorrelation methods respectively.
Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator

Laura Aulbach,Félix Salazar Bloise,Min Lu,Alexander W. Koch,Alexander Koch

DOI: https://doi.org/10.3390/s17030596

IF: 3.9

2017-03-15

Sensors

Abstract:The surface structure, especially the roughness, has a significant influence on numerous parameters, such as friction and wear, and therefore estimates the quality of technical systems. In the last decades, a broad variety of surface roughness measurement methods were developed. A destructive measurement procedure or the lack of feasibility of online monitoring are the crucial drawbacks of most of these methods. This article proposes a new non-contact method for measuring the surface roughness that is straightforward to implement and easy to extend to online monitoring processes. The key element is a liquid-crystal-based spatial light modulator, integrated in an interferometric setup. By varying the imprinted phase of the modulator, a correlation between the imprinted phase and the fringe visibility of an interferogram is measured, and the surface roughness can be derived. This paper presents the theoretical approach of the method and first simulation and experimental results for a set of surface roughnesses. The experimental results are compared with values obtained by an atomic force microscope and a stylus profiler.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Light Scattering For Testing Roughness Of Formed Surfwees

haiming wang

DOI: https://doi.org/10.1117/12.947069

1988-01-01

Abstract:Roughness is one of the most important characters of optical surfaces, especially in the case of diamond turned surfaces, the surface roughness reflects the dynamic characters of the diamona turning machine. It is suitable to monitor the roughness of diamond turned surfaces by light scattering. But up to now almost all of the scattering methods only deal with the flat surfaces. In a lot of actual cases, e.g. for machining the x-ray microscope objectives or Synchrotron Radiation beam-line mirrors, it is necesstrry to treat the surfaces with definite form. In this paper the author set up a theoretical model for describing light scattering from formed surfaces, and by means of statistical analysis of the scattered light, the contributions of form and roughness to the angular distribution of light can be separated, and the influences of the surface form on the testing of the surface roughness by light scattering can be removed.
The Modelling and Simulation of a Rough Surface

XJ GU,YY HUANG

DOI: https://doi.org/10.1016/0043-1648(90)90140-6

IF: 4.695

1990-01-01

Wear

Abstract:In this paper, new simulation methods of the actual surface are presented. A simulated surface which has similar statistical characteristics to those of the actual surface can be obtained through measurement of several profiles along different directions.
Review on Surface Polishing Methods of Optical Parts

Mingli Xie,Yipeng Pan,Zijun An,Shijun Huang,Min Dong

DOI: https://doi.org/10.1155/2022/8723269

IF: 2.0981

2022-05-14

Advances in Materials Science and Engineering

Abstract:With the extensive application of optical parts in many high-tech fields such as high-power laser, space optics, and aerospace, the requirements for the surface quality of optical parts are also increasing, which requires not only high surface qualities but also low defects including low subsurface damage and strict wavefront errors. As an essential link in the precision and ultraprecision optical manufacturing, various surface polishing methods and techniques have always attracted researchers' continuous study and exploration. Considering the development of optical part surface polishing technology in recent years, this study analyzes the principle and development process of typical processing methods represented by each kind of polishing technology, expounds the specific research progress of optical part surface polishing technology, including the iterative renewal of traditional technologies and the research development of new technologies, and gives examples for typical applications. Finally, the development trend of optical part surface polishing technology is prospected, which provides a reference for follow-up intensive research in optical manufacturing.

materials science, multidisciplinary
Study on Analytical Model of Surface Roughness Prediction in NC Machining

ZHANG Bin,YANG Maokui,LIU Mu

DOI: https://doi.org/10.3969/j.issn.1001-3881.2007.08.016

2007-01-01

Abstract:Analytical model that used to study the generation of surface topography is based on the principle of swept surface during cutting operation.In order to optimize NC machining conditions so as to achieve minimum surface roughness,the generation mechanism of work-piece surface must be studied and the effect factors of such cutting parameters as cutting speed,feed rate and depth of cut on surface roughness and its trend must be explored.A surface roughness prediction model for ball-end milling was established by using computer graphics algorithms.The model can give machined surface profiles and visualization of surface topography,surface roughness prediction and evaluation of machining parameters.
Development Of User-Friendly Software For The Roughness Measurement Of Ultra Smooth Surface

Huiyu Li,Yuhe Li,Qingxiang Li,Xiaohua Liao,Jinglin Zheng

DOI: https://doi.org/10.1117/12.676898

2006-01-01

Abstract:This paper describes the development of software used for the ultra smooth surface roughness measurement system, whose precision reaches nanometer level. The software mainly consists of two independent modules: the image acquisition and the roughness analysis modules. The first module controls the rotation of the phase-shifter and gathers images from the CCD camera. The process is repeated several times according to the means of calculating phase. The second module is used to analyze the sample's roughness. Firstly the images are loaded, and then the phase image is calculated and processed in the light of the unwrapping algorithm. Finally the roughness data are acquired by integrating the unwrapped phase image. The roughness carves on both x and y direction can be readily displayed and the roughness parameters are calculated and simultaneously shown. Then the three dimensional profile is displayed by employing the functions of OpenGL, and the parameter of the three dimensional roughness is also shown. All these results can be readily saved. The software is developed with VC++ 6.0, and has several characterizations as follows: it runs independently without any aid of other software; to depress the influence of noises, ten images are gathered at one time and averaged automatically; through loading image the software can discriminate that whether four-bucket or five-bucket method should be adopted, and choose the corresponding algorithm in the following calculations; the sample's three dimensional profile is also shown directly.

A Survey of the Research on Surface Roughness Measuring Development and Method

Survey of measurement methods for surface roughness

Surface Roughness Evaluation By Using Wavelets Analysis

Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

Leaf surface roughness measure based on shape from focus

A Measurement System for the Roughness of Ultra Smooth Surface with Large Aperture

Design of New Type Portable 3D Roughness Measuring Instrument

Study on the Influence of Roughness on the Detection for Mechanical Characteristics of the Machined Surface by Surface Acoustic Wave Dispersion Theory

Design of Surface Roughness Measurement Bench Based on Stewart Platform

Measurement of Aspheric Surface

A Study on 3D Micro-Topographical Measurement of FRCMC Grinding Surface

Real Time Measurement of Surface Roughness Using Laser Technique

Nanometer Scale Roughness Measurements with Atomic Force Microscopes

A new optical technique for roughness measurement on moving surface

Measurement of Device Surface Profile and Roughness

Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator

Light Scattering For Testing Roughness Of Formed Surfwees

The Modelling and Simulation of a Rough Surface

Review on Surface Polishing Methods of Optical Parts

Study on Analytical Model of Surface Roughness Prediction in NC Machining

Development Of User-Friendly Software For The Roughness Measurement Of Ultra Smooth Surface