Abstract:Mirror-finished surface products have a wide range of applications in different engineering industries, such as power generation, aerospace, semiconductors and optics. The surface topography of mirror-finished products is typically measured in a metrology laboratory, which is typically time consuming and cannot be integrated into the manufacturing process. To allow for in-situ product quality assurance and automatic tool change for manufacturing processes, a more accurate and responsive surface-measurement method is needed. For highly polished surfaces, a sub-micron surface fluctuation makes it possible to use light-scattering effects and image processing for surface texture analysis. A non-contact surface inspection system using a fringe-patterned illumination method is proposed in this paper. A predesigned pattern was projected onto the target surface, and its reflected image was captured by a camera. It was found that the surface parameters Sa and Sq, which are widely used to evaluate surface quality, are significantly correlated with luminous-intensity distribution. Another parameter, Str, which quantifies the uniformity of surface-texture directions due to polishing or grinding marks, was traditionally quantified after a complete-surface topographic measurement. In this research, a new approach is proposed to determine surface isotropy through a luminance-intensity distribution analysis. By rotating the test coupon, the variation of specular reflection showed correlation with the significance of surface-texture direction. The experimental results demonstrate that mirror-finished surfaces with a large deviation in luminance intensity across the pattern possess low Str values, which indicates low uniformity in surface texture.

Light Scattering For Testing Roughness Of Formed Surfwees

Roughness Characterization of Well-Polished Surfaces by Measurements of Light Scattering Distribution

Light-Scattering Method, Inspection Of Diamond Turning Process

Survey of measurement methods for surface roughness

Surface Roughness Evaluation By Using Wavelets Analysis

Simultaneous Testing Of The Form And The Roughness Of The Diamond Turned Optical Aspheric Surfaces

Inspection of diamond turning process by the combination of light scattering and angular deflection techniques: a proposed method

Light-Scattering Method for Characterizing Optical-Surfaces

Study on the Influence of Roughness on the Detection for Mechanical Characteristics of the Machined Surface by Surface Acoustic Wave Dispersion Theory

Method of In-Process Measurement of Wafer Surface Quality Based on Laser Scattering Principle

An experimental equipment for studying the whole space scattering from microrough surfaces

Modeling and Analysis of Uncertainty in On-Machine Form Characterization of Diamond-Machined Optical Micro-Structured Surfaces

A Survey of the Research on Surface Roughness Measuring Development and Method

Stochastic Model for Quantifying Effect of Surface Roughness on Light Reflection by Diffuse Reflectance Standards

Characterization of randomly rough surfaces using angle-resolved scattering of light and atomic force microscopy

Effects of surface roughness on light scattering by small particles

Surface Topography Measurement of Mirror-Finished Surfaces Using Fringe-Patterned Illumination

Electromagnetic wave scattering simulation from precision grinding SiC surface under the influence of suspended micro-particles

The Modelling and Simulation of a Rough Surface

Examination of surface roughness on light scattering by long ice columns by use of a two-dimensional finite-difference time-domain algorithm

Non-Contact Surface Roughness Measurement by Implementation of a Spatial Light Modulator