Simultaneous Testing Of The Form And The Roughness Of The Diamond Turned Optical Aspheric Surfaces

haiming wang

DOI: https://doi.org/10.1117/12.947184

1988-01-01

Abstract:As a result of air bearing and CNC technique, the diamond turning machine can cut the optical surfaces in very high accuracy ( e.g. the iiSG-325 Jiamond Turning Lathe can cut the surfaces with form accuracy in the range of o.5 o.25 micrometer, and finish 20 -- l0 nm ). Naturally it is very important to test the form and the roughness of the diamond turned surfaces. however almost all of the current methods for testing form and routhress of surfaces are difficult to test form and roughness simultaneously, and uneasy to be used as an on-line testing method. In this paper the author developes a simultaneous method for testing the form and the roughness of the diamond turned surfaces. A laser beam is used to scann over the surface under test, the angular distribution of the scattered light is received by a CCD array. The direction of the specular reflective light gives out the slope of the surface under test, and the scattering spectrum gives out the roughness of the surface. Moreover this method can be used as a fast automated on-line monitoring and diagnosing of the diamond turning machine.