Reflection Surface X-Ray Diffraction Patterns: K-Space Images

H Hong,Z Wu,TC Chiang,P Zschack,P Jemian,H Chen,RD Aburano
DOI: https://doi.org/10.1063/1.1305512
2000-01-01
Abstract:For the past two decades, x-ray diffraction has been utilized for surface structural determination. Unlike reflection high-energy electron diffraction (RHEED) which is a complicated dynamical scattering process, x-ray surface analysis is simple and straightforward due to the kinematic nature of x rays. Using high brilliance x rays from an undulator beamline and a highly sensitive charge coupled device detector, we successfully observed RHEED-like x-ray diffraction patterns. The patterns were recorded during the preparation of Si(111)-(7×7), transformation to Ge/Si(111)-(5×5) and Ge growth. Also, simultaneous measurements of x-ray reflectivity and crystal truncation rods are shown feasible with this technique.
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