Experimental Study on Soft X-Ray Diffraction of a Two-Dimensional Array

Xiangdong Xu,Yiling Hong,Tonglin Huo,Shiping Jiang,Xiaobing Shan,Shaoguang Yang,Shaojun Fu
DOI: https://doi.org/10.3321/j.issn:0253-2239.2000.09.018
2000-01-01
Abstract:The experiment of soft X-ray diffraction was carried out with synchrotron radiation to a two-dimensional array. Some images, which correspond to 0, 2 mm and 80 mm separation behind the specimen, were recorded as a relief pattern on photoresist by the use of 3.2 nm X-ray from U-12A bending magnet at national Synchrotron Radiation Laboratory. The processed photoresists were enlarged with an optical microscope. The experimental results show that patterns vary with the distance between specimen and photoresist detector, which are in good agreement with the theoretical results.
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