Experimental Investigation Of Soft X-Ray Diffraction

xiangdong xu,yilin hong,tonglin huo,shipiing jiang,xiaobin shan,shaoguang yang,shaojun fu
DOI: https://doi.org/10.1063/1.1291199
2000-01-01
Abstract:The experimental study on soft x-ray diffraction using gold test objects has been carried out with synchrotron radiation at NSRL. Some images, which correspond to 0, 2 and 80 mm away from a specimen, were recorded as relief pattern on photoresist with use of 3.2nm x-rays from U12A hemline. The experimental result shows that patterns vary with the distance between specimen and photoresist detector, which is in excellent agreement with the theoretical one.
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