Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

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Vibration Compensating Beam Scanning Interferometer for Surface Measurement

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System Optimization of Radial Shearing Interferometer for Aspheric Testing

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Research on Two Optical Methods for Aspheric Measurement

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A self-referenced interferometer for in situ cryogenic wafer curvature measurements

Full-field measurement of nonuniform stresses of thin films at high temperature.

Aspherical Surface Wavefront Testing Based on Multi-Directional Orthogonal Lateral Shearing Interferometry

In situ calibration of shear ratio for quadriwave lateral shearing interferometry using double-slit interference

Multi-pitch Nano-Accuracy Surface Profiler for Strongly Curved X-ray Mirror Metrology

Fiber-coupled common-path shearography for simultaneous measurement of surface deformation and slope

High-Precision Large Deflection Measurements of Thin Films Using Time Sequence Speckle Pattern Interferometry