Preparation of Diamond-Like Carbon Films and Diamond Films by Pulsed Laser Deposition

Guowei Yang

1998-01-01

Abstract:The development of diamond-like carbon films and diamond films prepared by pulsed laser deposition is reviewed,followed by summarization of mechanism and characteristics of thin films by pulsed laser deposition.The effect of laser wavelength and energy,and substrate temperature,etc.on growth of the films is discussed.

What problem does this paper attempt to address?

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

王淑云,郭延龙,刘旭,曹海源,王会升,程勇

DOI: https://doi.org/10.3788/hplpb201002208.1705

2010-01-01

High Power Laser and Particle Beams

Abstract:A femtosecond pulsed laser(800 nm, 120 fs, 3 W, 1 000 Hz) was used to deposit diamond-like carbon(DLC) films on Si substrate. Effects of bias, substrate temperature and oxygen ambient on DLC films were studied. Experiments show that the best DLC film was deposited under the conditions of room temperature, no bias and low oxygen pressure(2 Pa). The hydrogenfree DLC film was deposited on one side of Si substrate, and on the other side, the common anti-reflective film was pre-deposited. The average transmittance at 3~5 μm waveband was larger than 90%, and the nano-hardness was up to 40 GPa. There were no nicks on the film after being rubbed for 105 times by a 9.8 N rubber. Furthermore, the films have passed the high temperature, low temperature and salt-fog tests in military standards. T
A review on diamond-like carbon films grown by pulsed laser deposition

Yimin Lu,Guojun Huang,Sai Wang,Chaowei Mi,Shangfang Wei,Fangtao Tian,Wei Li,Haiyuan Cao,Yong Cheng

DOI: https://doi.org/10.1016/j.apsusc.2020.148573

IF: 6.7

2021-03-01

Applied Surface Science

Abstract:Pulsed laser deposition is an excellent technology for growing diamond-like carbon films. It can provide sufficient ion energy at a low temperature to achieve the desired compound or doped coating during the deposition process. This review discusses the influence of the dominant laser parameters, ambient gas, and substrate-target conditions on the various properties of diamond-like carbon films by arranging the data reported in the last decade. Details of the basic and advanced pulsed laser deposition processes used to grow diamond-like carbon coatings are reviewed, and the highly adhesive diamond-like carbon film deposited by advanced pulsed laser deposition is emphasized. The excellent protective performance of diamond-like carbon films prepared by pulsed laser deposition is attributed to their high hardness, chemical inertness, low friction, and superior wear resistance, leading to applications in the fields of tribology, mechanics, medicine, and optics. Double laser beam deposition, hybrid pulsed laser deposition, and ion management in a magnetic field, which represent the development of pulsed laser deposition, are also discussed. This review is expected to offer assistance and inspiration to researchers engaged in the growth of diamond-like carbon films.

chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
The Development of Ultra-Fast Pulse Laser Deposition of Diamond-Like Carbon Films

GUO Yanlong,WANG Xiaobing,Wan Qiang,LU Changyong

2005-01-01

Laser & Optoelectronics Progress

Abstract:The advantage and limit of pulse laser deposition(PLD) of diamond-like carbon films(DLC), the remedy of PLD DLC limit, and the research on the next development of PLD DLC, ultra-fast pulse laser deposition of diamond-like films are summarized.
DEPOSITION OF DIAMOND-LIKE AND OTHER SPECIAL COATINGS BY PULSED LASER ABLATION AND THEIR POST-SYNTHESIS PROCESSING

S.B. Ogale,A.P. Malshe,S.M. Kanelkar

DOI: https://doi.org/10.1080/10426919308934812

IF: 4.7832

1993-01-01

Materials and Manufacturing Processes

Abstract:Use of pulsed laser ablation technique for deposition of diamond-like and other special coatings is discussed here at length, establishing the correlation between the process parameters and the film quality. Process parameters dealt with sufficient detail are the laser wavelength, laser pulse width and energy density, nature of ambient and the corresponding partial pressure, substrate temperature and the electric field, if any, applied during deposition. The optimum parameter space for deposition of films having high performance features are identified in the case of diamond-like films and films of cubic boron nitride, titanium nitride and tungsten carbide. In this context, results on the characterization of the films deposited under different conditions are discussed. These include data obtained by Raman spectroscopy, IR spectroscopy, X-ray diffraction, ellipsometry, UV-VIS transmission, scanning electron microscopy. The post-synthesis of the laser deposited films using ion and laser beams from I he standpoint of enhancing their quality or etching of dielectric features therein are also discussed.

materials science, multidisciplinary,engineering, manufacturing
Diamond-like Carbon Thin Films Prepared by ECR Argon Plasma Assisted Pulsed Laser Deposition

A. M. Wu,J. Sun,X. K. Shen,N. Xu,Z. F. Ying,Z. B. Dong,J. D. Wu

DOI: https://doi.org/10.1016/j.diamond.2005.09.039

IF: 3.806

2006-01-01

Diamond and Related Materials

Abstract:Diamond-like carbon films were prepared by pulsed laser ablation of graphite target in argon plasma produced from electron cyclotron resonance (ECR) microwave discharge and analyzed by Raman spectroscopy and Fourier transform infrared (FTIR) spectroscopy. The analysis shows that the films prepared with argon plasma assistance have different chemical structure compared with the films prepared in vacuum without plasma assistance. The structure of the films prepared with plasma assistance depends strongly on the bias voltages applied on the substrate. Surface morphology observation shows that the films prepared with argon plasma assistance have a smoother surface than the films prepared without plasma assistance. The re-sputtering of the growing film due to the bombardment of the plasma stream results in reduction of the deposition rate. The ablation plumes during film preparation with and without plasma assistance were examined through optical emission spectroscopy. In vacuum, emission lines from mono-atomic carbons and carbon ions dominate the plume emission. In argon plasma, the plume emission exhibits different behavior in its temporal and spatial evolution. It is initially dominated by strong lines from mono-atomic carbons and carbon ions and then evolves to consist mainly of emissions from C2 molecules superposed on a featureless continuum. It is also found that the emission intensity of the C2 molecules as well as the continuum varies with the bias voltages.
Surface Morphologies of Pulsed Laser Deposited Ultra-Thin Diamond-like Carbon Films

C Ning,QR Hou,J Gao,KY Chan,DL Phillips

DOI: https://doi.org/10.1142/s0217984997000578

1997-01-01

Modern Physics Letters B

Abstract:The surface morphologies of pulsed laser deposited ultra-thin diamond-like carbon films were studied by optical microscopy and atomic force microscopy. Off-axis deposited films had a larger size of particulates than on-axis deposited films. The root-mean-squared surface roughness was sensitive to deposition temperature. As a protective coating, the film was deposited on porous silicon. The surface morphology of the porous silicon changed considerably after carbon coating.
Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

NN Jiang,TM Shao,DR Chen

DOI: https://doi.org/10.4028/www.scientific.net/msf.475-479.3901

2005-01-01

Materials Science Forum

Abstract:Diamond like carbon (DLC) films were prepared on Si wafer, using laser induced arc deposition (Laser arc) technique. Results of Raman Spectra analysis showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological properties were investigated by using Atomic Force Microscope and Nano-Scratch Tester. Influences of arc voltage, substrate bias voltage, target materials and substrate pre-treatment methods upon the film structures and film properties were studied.
Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Xinchao Bian,Qiang Chen,Yuefei Zhang,Lijun Sang,Wenjie Tang

DOI: https://doi.org/10.1016/j.surfcoat.2008.06.143

IF: 4.865

2008-01-01

Surface and Coatings Technology

Abstract:At an atmospheric pressure, with Ar as diluted gas and CH4 as precursor gas, nano-scale diamond-like carbon (n-DLC) film was successfully deposited on P-silicon substrate by a dielectric barrier discharge (DBD) plasma gun. The structure and composition of DLC film were analyzed by Fourier Transform Infrared (FTIR) spectroscopy and Laser Raman spectroscopy; through Scanning Electron Microscope (SEM) and Atomic Force Microscopy (AFM), one observed the surface morphology of DLC film; the thickness and the mechanical property were determined by surface profilemeter and friction and wearability tester, respectively. Also, in-situ optical emission spectroscopy (OES) was applied to diagnose radical reactions in DBD gun. The role of reactive particles for DLC growth process is expected to identify.
Pulsed Laser Deposition and Its Application in Magnetic Films

邓联文,江建军,何华辉

DOI: https://doi.org/10.3321/j.issn:1005-023x.2003.02.022

2003-01-01

Abstract:The pulsed laser deposition is a new technique for the growth of thin films.Its physical principle and unique characteristics and research progress in this area are introduced briefly.Preparation of magnetic films by PLD is also described.
Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition

Zhang Zhen-Yu,Lu Xin-Chun,Luo Jian-Bin

DOI: https://doi.org/10.1088/1009-1963/16/12/039

2007-01-01

Abstract:A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp(2), Sp(3) and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67 123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17 41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.
A practical guide to pulsed laser deposition

Nick A. Shepelin,Zahra P. Tehrani,Natacha Ohannessian,Christof W. Schneider,Daniele Pergolesi,Thomas Lippert

DOI: https://doi.org/10.1039/d2cs00938b

IF: 46.2

2023-03-16

Chemical Society Reviews

Abstract:Nanoscale thin films are widely implemented across a plethora of technological and scientific areas, and form the basis for many advancements that have driven human progress, owing to the high degree of functional tunability based on the chemical composition. Pulsed laser deposition is one of the multiple physical vapour deposition routes to fabricate thin films, employing laser energy to eject material from a target in the form of a plasma. A substrate, commonly a single-crystal oxide, is placed in the path of the plume and acts as a template for the arriving species from the target to coalesce and self-assemble into a thin film. This technique is tremendously useful to produce crystalline films, due to the wide range of atmospheric conditions and the extent of possible chemical complexity of the target. However, this flexibility results in a high degree of complexity, oftentimes requiring rigorous optimisation of the growth parameters to achieve high quality crystalline films with desired composition. In this tutorial review, we aim to reduce the complexity and the barrier to entry for the controlled growth of complex oxides by pulsed laser deposition. We present an overview of the fundamental and practical aspects of pulsed laser deposition, discuss the consequences of tailoring the growth parameters on the thin film properties, and describe in situ monitoring techniques that are useful in gaining a deeper understanding of the properties of the resultant films. Particular emphasis is placed on the general relationships between the growth parameters and the consequent structural, chemical and functional properties of the thin films. In the final section, we discuss the open questions within the field and possible directions to further expand the utility of pulsed laser deposition.

chemistry, multidisciplinary
Laser-assisted Chemical Vapor Deposition of Diamond Films

DM Ren,XY Hu,FM Liu,YC Qu,JS Zhao

DOI: https://doi.org/10.1117/12.317961

1998-01-01

Abstract:In this paper,it is reported that diamond films have been synthesized by the Laser Assisted Chemical Vapor Deposition(LACVD) method using the mixture of acetone and hydrogen. The XeCl excimer laser with a wavelength of 308nm has been ultilized as photo-dissociation energy source for carbohydrate, and H-2 has been predissociated by hot filament at the temperature of 2000 degrees C. P-type silicons was employed as substrate, which temperature was controlled at about 800 degrees C. The specimens deposited by the method of LACVD were analyzed and evaluated by Raman spectroscopy and scanning electronics microscopy (SEM) accordingly. A character peak of diamond films at 1332cm(-1) can be observed from Raman spectrum. The experimental result have shown that a high-quality diamond film can be obtained.
Diamond-Like Carbon Thin-Film Deposition Using A Magnetically Confined Rf Pecvd System

S.R.P. Silva,K.J. Clay,S.P. Speakman,G.A.J. Amaratunga

DOI: https://doi.org/10.1016/0925-9635(94)00266-5

IF: 3.806

1995-01-01

Diamond and Related Materials

Abstract:Diamond-like carbon thin films have been deposited at low temperatures, using local magnetic confinement in a r.f.-powered plasma-enhanced chemical vapour deposition process. The increased plasma density and temperature obtained by magnetically confining the plasma, increases the ionization of the hydrocarbon gas in the deposition chamber. The modified plasma is characterized together with the material properties of the deposited films. A model is proposed to explain the dissociation of species in the plasma and the plasma temperature based on the observed results. Doping of the films using nitrogen gas fed in with the hydrocarbon is also investigated.
Pulsed laser deposition technique and its applications in the study of functional thin films

Meiya Li,ZhongLie Wang,KuiXun Lin,GuangCheng Xiong,Shoushan Fan

1998-01-01

Abstract:Pulsed laser deposition is a new promising technique for the growth of thin films. The principle, characteristics and advantages of this technique were introduced. Its intensive applications in the study of functional thin films were reviewed.
Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method

Travis McKindra,Matthew J. O'Keefe,Zhiqiang Xie,Yongfeng Lu

DOI: https://doi.org/10.1016/j.matchar.2010.03.011

IF: 4.537

2010-01-01

Materials Characterization

Abstract:Diamond thin films were deposited by a CO2 laser-assisted O2/C2H2/C2H4 combustion-flame process. The effect of the deposition parameters, in particular the laser wavelength and power, on the film surface morphology, microstructure and phases present was the primary focus of the work. The laser power was set at 100, 400 and 800W while the wavelength was varied and set at 10.591µm in the untuned condition and set at 10.532µm to resonantly match the CH2-wagging vibrational mode of the C2H4 molecule when in the tuned condition. When the laser was coupled to the combustion flame during deposition the diamond film growth was enhanced as the lateral grain size increased from 1µm to greater than 5µm. The greatest increase in grain size occurred when the wavelength was in the tuned condition. Scanning transmission electron microscopy images from focused-ion beam cross-sectioned samples revealed a sub-layer of smaller grains less than 1µm in size near the substrate surface at the lower laser powers and untuned wavelength. X-ray diffraction results showed a more intense Diamond (111) peak as the laser power increased from 100 to 800W for the films deposited with the tuned laser wavelength. Micro-Raman spectra showed a diamond peak nearly twice as intense from the films with the tuned laser wavelength.
AFM Observation and Application of Diamond-Like Carbon Films

N Chi,QR Hou,J Gao

DOI: https://doi.org/10.1142/s0217984998000159

1998-01-01

Modern Physics Letters B

Abstract:The surface morphologies of pulsed laser deposited thick diamond-like carbon films were studied by optical microscopy and atomic force microscopy. The thick films had a much larger density of particulates and a much rougher surface than thin films. As a protective coating, a thin film was deposited on porous silicon. Two peaks (708 nm and 768 nm) were suppressed greatly while the peak 646 nm was not. The reason for these changes was discussed.
Optical and Electrical Properties of Diamond-like-Carbon Coatings Prepared by Electron Cyclotron Resonance Ion Beam Deposition Process

Callum Wiseman,Marwa Ben Yaala,Chalisa Gier,Laurent Marot,Christopher McCormick,Caspar Clark,Sheila Rowan,Stuart Reid

2024-06-11

Abstract:Diamond-like carbon thin films have emerged as durable, chemically stable optical coatings for many optical and optoelectronics applications due to their hardness, chemical inertness, and optical transparency. This paper presents a novel high-energy electron cyclotron resonance ion beam sputter deposition technique to fabricate pure diamond-like carbon coatings at room temperature. The chemical composition of the deposited coatings including ratios of sp2/sp3 bonding in the thin films were determined by X-ray photoelectron spectroscopy. Results indicate that the sp3 percentage ranges from 45% - 85%. The transmission and reflectance spectra of the coatings were measured from UV to IR ({\lambda}= 185 to 2500 nm) by utilizing a spectrophotometer. The measured spectra were analysed by the Tauc method to determine the optical band gap and Urbach energy and an optical fitting software, which utilizes the model modified by OJL, to extract the refractive index and extinction coefficient. By varying the ion energy, the optical properties were found to be n = 2.30 - 2.51, band gap energy = 0.4 - 0.68 eV, and the Urbach energy = 0.33 - 0.49 eV. This study provides a flexible method for tuning the structural, optical, and electronic properties of diamond-like carbon coatings by controlling the ion energy during deposition.

Applied Physics,Materials Science
Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

K. J. Koivusaari,J. Levoska,S. Leppävuori

DOI: https://doi.org/10.1063/1.369057

IF: 2.877

1999-03-01

Journal of Applied Physics

Abstract:In the pulsed-laser deposition process, high intensity laser pulses expel material from a solid target and form expanding plasma near the solid surface. The expansion of the plasma produces a forward-directed beam of ionized and neutral species with typical energies of 1–100 eV. In this study, amorphous diamond-like carbon (DLC) thin films were deposited onto silicon substrates at room temperature using an XeCl excimer laser (wavelength 308 nm, pulse length 20 ns) with laser fluences in the range 5–45 J cm−2, on a pyrolytic graphite target. The effect of laser fluence on the velocity and kinetic energy distribution of carbon ions was measured by time-of-flight (TOF) spectrometry using a system based on a Faraday cup with biased grids, and a multichannel plate based particle detector. We have found high kinetic energies, up to 500 eV, for expelled atomic species. In order to study the effect of the energy of the arriving ions on the structure of DLC, the bonding of carbon atoms in films, deposited under similar conditions as in the TOF measurements, was studied by x-ray absorption near-edge structure.

physics, applied
Pulsed Laser Deposition of Diamond-Like Carbon Films under a Magnetic Field

QR Hou,J Gao

DOI: https://doi.org/10.1088/0953-8984/9/47/003

1997-01-01

Journal of Physics Condensed Matter

Abstract:Pulsed laser deposition of diamond-like carbon films under a magnetic field has been studied. The magnetic field with its direction parallel to the surfaces of substrate and target can significantly enlarge the volume of green plume, and hence improve the uniformity. It has been found that not only the uniformity of thickness but also the hardness of films grown by this method were greatly improved. These diamond-like carbon films were analysed by atomic force microscopy and micro-hardness measurements. The root-mean-squared surface roughness of the films was about 0.265 nm. The hardness of films made by this technique can reach up to .
A New Reactive Pulsed Laser Ablation Technique for the Deposition of Hard Carbon and Carbon-Nitride Thin Films

I Alexandrou,I Zergioti,GAJ Amaratunga,MJF Healy,CJ Kiely,P Hatto,M Velegrakis,C Fotakis

DOI: https://doi.org/10.1016/s0167-577x(98)00223-7

IF: 3

1999-01-01

Materials Letters

Abstract:A new configuration of the pulsed laser deposition (PLD) technique for improving the growth of thin films in a gas ambient is described. A nozzle arrangement is used to create high pressure N2 and He pulses in the region above an ablated carbon target for the formation of C:N and C thin films. Films deposited by both the standard and the new configuration are compared in terms of their mechanical properties, nitrogen concentration and microstructure. When the standard configuration is used, the maximum values attained for the nitrogen concentration and film microhardness are 32.25% and 13 GPa, respectively. When the pulsed N2 nozzle configuration is used, the nitrogen concentration (30.58%) is almost equal to the highest value attained with the standard configuration but the film microhardness is higher (15.8 GPa). When the He nozzle is used the film microhardness increases further, up to a value of 34 GPa. Interestingly, the elastic recovery of most films reaches relatively high values, between 60% and 70%. In all cases the films are amorphous and macroparticle inclusions are observed.

Preparation of Diamond-Like Carbon Films and Diamond Films by Pulsed Laser Deposition

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

A review on diamond-like carbon films grown by pulsed laser deposition

The Development of Ultra-Fast Pulse Laser Deposition of Diamond-Like Carbon Films

DEPOSITION OF DIAMOND-LIKE AND OTHER SPECIAL COATINGS BY PULSED LASER ABLATION AND THEIR POST-SYNTHESIS PROCESSING

Diamond-like Carbon Thin Films Prepared by ECR Argon Plasma Assisted Pulsed Laser Deposition

Surface Morphologies of Pulsed Laser Deposited Ultra-Thin Diamond-like Carbon Films

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Pulsed Laser Deposition and Its Application in Magnetic Films

Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition

A practical guide to pulsed laser deposition

Laser-assisted Chemical Vapor Deposition of Diamond Films

Diamond-Like Carbon Thin-Film Deposition Using A Magnetically Confined Rf Pecvd System

Pulsed laser deposition technique and its applications in the study of functional thin films

Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method

AFM Observation and Application of Diamond-Like Carbon Films

Optical and Electrical Properties of Diamond-like-Carbon Coatings Prepared by Electron Cyclotron Resonance Ion Beam Deposition Process

Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

Pulsed Laser Deposition of Diamond-Like Carbon Films under a Magnetic Field

A New Reactive Pulsed Laser Ablation Technique for the Deposition of Hard Carbon and Carbon-Nitride Thin Films