The Development of Ultra-Fast Pulse Laser Deposition of Diamond-Like Carbon Films

GUO Yanlong,WANG Xiaobing,Wan Qiang,LU Changyong

2005-01-01

Laser & Optoelectronics Progress

Abstract:The advantage and limit of pulse laser deposition(PLD) of diamond-like carbon films(DLC), the remedy of PLD DLC limit, and the research on the next development of PLD DLC, ultra-fast pulse laser deposition of diamond-like films are summarized.

What problem does this paper attempt to address?

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

王淑云,郭延龙,刘旭,曹海源,王会升,程勇

DOI: https://doi.org/10.3788/hplpb201002208.1705

2010-01-01

High Power Laser and Particle Beams

Abstract:A femtosecond pulsed laser(800 nm, 120 fs, 3 W, 1 000 Hz) was used to deposit diamond-like carbon(DLC) films on Si substrate. Effects of bias, substrate temperature and oxygen ambient on DLC films were studied. Experiments show that the best DLC film was deposited under the conditions of room temperature, no bias and low oxygen pressure(2 Pa). The hydrogenfree DLC film was deposited on one side of Si substrate, and on the other side, the common anti-reflective film was pre-deposited. The average transmittance at 3~5 μm waveband was larger than 90%, and the nano-hardness was up to 40 GPa. There were no nicks on the film after being rubbed for 105 times by a 9.8 N rubber. Furthermore, the films have passed the high temperature, low temperature and salt-fog tests in military standards. T
Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Xinchao Bian,Qiang Chen,Yuefei Zhang,Lijun Sang,Wenjie Tang

DOI: https://doi.org/10.1016/j.surfcoat.2008.06.143

IF: 4.865

2008-01-01

Surface and Coatings Technology

Abstract:At an atmospheric pressure, with Ar as diluted gas and CH4 as precursor gas, nano-scale diamond-like carbon (n-DLC) film was successfully deposited on P-silicon substrate by a dielectric barrier discharge (DBD) plasma gun. The structure and composition of DLC film were analyzed by Fourier Transform Infrared (FTIR) spectroscopy and Laser Raman spectroscopy; through Scanning Electron Microscope (SEM) and Atomic Force Microscopy (AFM), one observed the surface morphology of DLC film; the thickness and the mechanical property were determined by surface profilemeter and friction and wearability tester, respectively. Also, in-situ optical emission spectroscopy (OES) was applied to diagnose radical reactions in DBD gun. The role of reactive particles for DLC growth process is expected to identify.
A review on diamond-like carbon films grown by pulsed laser deposition

Yimin Lu,Guojun Huang,Sai Wang,Chaowei Mi,Shangfang Wei,Fangtao Tian,Wei Li,Haiyuan Cao,Yong Cheng

DOI: https://doi.org/10.1016/j.apsusc.2020.148573

IF: 6.7

2021-03-01

Applied Surface Science

Abstract:Pulsed laser deposition is an excellent technology for growing diamond-like carbon films. It can provide sufficient ion energy at a low temperature to achieve the desired compound or doped coating during the deposition process. This review discusses the influence of the dominant laser parameters, ambient gas, and substrate-target conditions on the various properties of diamond-like carbon films by arranging the data reported in the last decade. Details of the basic and advanced pulsed laser deposition processes used to grow diamond-like carbon coatings are reviewed, and the highly adhesive diamond-like carbon film deposited by advanced pulsed laser deposition is emphasized. The excellent protective performance of diamond-like carbon films prepared by pulsed laser deposition is attributed to their high hardness, chemical inertness, low friction, and superior wear resistance, leading to applications in the fields of tribology, mechanics, medicine, and optics. Double laser beam deposition, hybrid pulsed laser deposition, and ion management in a magnetic field, which represent the development of pulsed laser deposition, are also discussed. This review is expected to offer assistance and inspiration to researchers engaged in the growth of diamond-like carbon films.

chemistry, physical,physics, applied, condensed matter,materials science, coatings & films
Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition

Zhang Zhen-Yu,Lu Xin-Chun,Luo Jian-Bin

DOI: https://doi.org/10.1088/1009-1963/16/12/039

2007-01-01

Abstract:A novel method, pulsed laser arc deposition combining the advantages of pulsed laser deposition and cathode vacuum arc techniques, was used to deposit the diamond-like carbon (DLC) nanofilms with different thicknesses. Spectroscopic ellipsometer, Auger electron spectroscopy, x-ray photoelectron spectroscopy, Raman spectroscopy, atomic force microscopy, scanning electron microscopy and multi-functional friction and wear tester were employed to investigate the physical and tribological properties of the deposited films. The results show that the deposited films are amorphous and the sp(2), Sp(3) and C-O bonds at the top surface of the films are identified. The Raman peak intensity and surface roughness increase with increasing film thickness. Friction coefficients are about 0.1, 0.15, 0.18, when the film thicknesses are in the range of 17-21 nm, 30-57 nm, 67 123 nm, respectively. This is attributed to the united effects of substrate and surface roughness. The wear mechanism of DLC films is mainly abrasive wear when film thickness is in the range of 17 41 nm, while it transforms to abrasive and adhesive wear, when the film thickness lies between 72 and 123 nm.
Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

NN Jiang,TM Shao,DR Chen

DOI: https://doi.org/10.4028/www.scientific.net/msf.475-479.3901

2005-01-01

Materials Science Forum

Abstract:Diamond like carbon (DLC) films were prepared on Si wafer, using laser induced arc deposition (Laser arc) technique. Results of Raman Spectra analysis showed that the as-deposit films were amorphous, having obvious sp3 structure. Meanwhile, surface topography and micro-tribological properties were investigated by using Atomic Force Microscope and Nano-Scratch Tester. Influences of arc voltage, substrate bias voltage, target materials and substrate pre-treatment methods upon the film structures and film properties were studied.
Diamond-like Carbon Films Deposited by Femtosecond Laser Pulses

Yanlong Guo,Xiao Yuan,Shuyun Wang,Changyong Lu,Xiaobing Wang,Yong Cheng,Haiyuan Cao,Xu Liu

DOI: https://doi.org/10.1117/12.757418

2007-01-01

Abstract:Hydrogen-free DLC films has been deposited by femtosecond laser pulse onto (1 0 0) p-type silicon substrates. The laser used for deposition has a pulse energy from 0.4mJ to 1.6mJ and pulse width of about 50 fs with the repetition rate of 1 kHz. The laser intensities on the target are from 0.7 x 10(14) W/cm(2) to 2.8 x 10(14) W/cm(2). Uniform and wear-resistant DLC films is deposited with fs laser ablating a high purity graphite target at room temperature in vacuum. It is shown that the films has a good hardness ranged from 20 GPa to 30 GPa. Raman spectroscopy, X-ray Photoelectron Spectroscopy and micro-hardness are used to analyze the comprehensive performance of the films, and the results show that the films deposited at the laser intensity of 1.4 x 10(14)W/cm(2) has better hardness and a higher sp(3) content. The sp(3) fraction of the films is estimated to be as high as 45.6%.
Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

R. Meyer,F. Stock,F. Antoni,F. Z. Lahboub,S. Hajjar-Garreau,D. Muller

DOI: https://doi.org/10.1007/s10854-023-10802-2

2023-06-18

Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
Effects of deposited particle energy on the structure and properties of diamond-like carbon films

Haiping Tian,Song Jie,Pengjiao Zhang,Junzhou Li,Sun An

DOI: https://doi.org/10.1016/j.diamond.2023.110671

IF: 3.806

2023-12-07

Diamond and Related Materials

Abstract:Using plasma-enhanced chemical vapor deposition (PECVD), a series of diamond-like carbon (DLC) films were prepared on YG8 carbide substrate by changing the enhancement mode and the negative bias voltage of the substrate. The structure and properties of the deposited films were tested by a series of analytical and testing instruments. During the deposition of DLC films, the ability of electrons to collide and ionize the gas is enhanced by increasing the number of electrons and extending the movement path of electrons, which is called electron-assisted enhanced gas ionization. Four different experimental modes (A mode, B mode, C mode, D mode) were set up. Different experimental modes have different degrees of electron-assisted enhancement ability of gas ionization, so different experimental modes are called different enhancement modes. The ions ionized by the electrons participate in the deposition of the film under the traction of the negative bias voltage of the substrate. The results show that: when depositing diamond-like carbon films, the energy of the ion beam is indirectly affected by electron collisions in different enhancement modes and directly affected by the negative bias voltage of the substrate. The higher the enhancement mode, the higher the ion beam energy. The higher the substrate negative bias voltage, the higher the ion beam energy generated by gas source discharge. Under the dual action of enhancement mode and substrate negative bias voltage, the total energy of ions involved in deposition should not be too high or too low, and the synergy of the two makes the properties and quality of the deposited film reach a better value. For industrial large-scale production of tool protection film for cutting aluminum alloy, it is more suitable for high enhancement mode and low negative bias voltage production. Through a series of process optimization to improve and enhance the comprehensive performance of DLC film, it is further applied to the actual processing application field, which has great industrial and social value to realize the large-scale application of DLC film in the field of hard to cut metal processing.

materials science, multidisciplinary,physics, applied, condensed matter, coatings & films
Diamond-like Carbon Film on 20 CrNiMo Steel Prepared by Hollow-Cathode Glow Discharge

CHEN Fei,CHEN Jia-qing,ZHOU Hai,ZHANG Yue-fei

DOI: https://doi.org/10.13289/j.issn.1009-6264.2011.03.003

2011-01-01

Abstract:Diamond-like carbon(DLC) thin film was deposited on the surface of 20CrNiMo alloy by hollow cathode glow discharge technique.High purity graphite was selected as the cathode and Ar as working gas.The structure of the DLC thin film was analyzed by laser Raman spectroscopy.Surface morphology of the film was observed by atomic force microscope(AFM).The adhesion between the DLC thin film and the substrate was investigated with scratch testing.The morphology of the scratch was observed by scanning electron microscopy(SEM).Friction and wear behavior of the DLC thin film under dry sliding against GCr15 steel was evaluated on a ball-on-disc test rig.The results show that it is feasible to prepare a DLC thin film of 0.6 μm thick by this experimental process.The surface roughness Ra of the film is 7-8 nm.The DLC thin film has a good adhesion with critical load of 52 N by scratch testing.Excellent friction and wear-resistant behavior of the film is observed.Friction coefficient of the 20CrNiMo substrate is about 0.50 under dry sliding against steel,while the DLC thin film exhibited much lower friction coefficient of 0.15 under the same testing condition.
Diamond-Like Carbon Thin Films Deposited On Ti6al4v Alloy Surface By Plasma Gun At Atmospheric Pressure

Chen Fei,Zhou Hai,Zhang Yuefei,Lu Fanxiu

DOI: https://doi.org/10.3969/j.issn.1002-185X.2012.01.028

2012-01-01

Rare Metal Materials and Engineering

Abstract:At atmospheric pressure, diamond-like carbon (DLC) thin films were deposited on the Ti6Al4V alloy surface by a DBD plasma gun at low temperature (<350 degrees C), with CH4 as a precursor and Ar as dilution gas. The structure of the DLC thin film was analyzed by Laser Raman spectroscope and X-ray photoelectron spectroscopy. The surface morphology was observed through scanning electron microscopy. The adhesion between the DLC thin film and the substrate was investigated with the scribe testing. The friction and wear behavior of the DLC thin films under dry sliding against GCr15 steel was evaluated on a ball-on-disc test rig. The results show that it is feasible to prepare a DLC thin film of 1.0 mu m thickness by a plasma gun. The film is uniform and dense and the surface roughness R-a is about 13.23 nm. The critical load of adhesion force between the DLC thin film and the substrate is 31.0 N. It has been found that the DLC thin film has excellent friction- and wear-resistant behavior. The friction coefficient of the Ti6Al4V substrate is about 0.50 under dry sliding against steel, while the DLC thin film experiences much abated friction coefficient to 0.15 under the same testing condition.
Diamond-like Carbon Film Synthesized by Ion Beam Assisted Deposition and Its Tribological Properties

XM He,WZ Li,HD Li

DOI: https://doi.org/10.1116/1.580079

1996-01-01

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Abstract:Ion beam assisted deposition offers a novel and unique process to prepare diamond-like carbon (DLC) films at room temperature with particularly good interface adhesion. This advantage is explored to deposit highly wear resistant DLC coating on AISI 52100 steel. Various bombarding species and energy are examined to optimize the process. Infrared, Raman, Auger electron spectroscopy spectra, and hardness measurements are used to characterize the structure and properties of DLC films. The friction and wear behavior of DLC films are systematically investigated by performing extensive experiments in different testing styles. It is disclosed that by means of a dynamic mixing of atoms in interfaces, a pure metal intermediate layer can tremendously improve the tribological properties of DLC films on 52100 steel. The results are optimistic and may lead to useful applications.
Research Progress of Metal Doped Diamond-like Carbon Films

GUO Yan-long,SUN You-wen,WANG Shu-yun,WANG Xiao-bing,CHENG Yong,LU Chang-yong

DOI: https://doi.org/10.16080/j.issn1671-833x.2017.13.077

2009-01-01

Laser & Optoelectronics Progress

Abstract:Diamond-like carbon (DLC) films have attracted more and more attention due to their promising mechanical and tribological properties.However,there are some problems in DLC films such as high internal stress,low thermal stability,which restrict the further application and development of DLC films.Moderate metal doped in the DLC films can form nanocrystallines or MeC nanoparticles in the matrix,which depend on the bonding mode between metal and carbon.Those particles with high activity increase the grain boundary slip and change the structure of films,which in turn improve the mechanical and tribological performance of DLC films,and thus provide a new idea for the application and development of the film.Current research progress of the metal doped DLC films is summarized and the development trend of those films in the future is put forward.
Characterisation of Diamond-Like Carbon (DLC) laser targets by Raman spectroscopy

D. Haddock,T Parker,C Spindloe,M Tolley

DOI: https://doi.org/10.1088/1742-6596/713/1/012007

2016-04-01

Journal of Physics: Conference Series

Abstract:The search for target materials suitable for High Power Laser Experiments at ultralow thicknesses (below ten nanometres) is ongoing. Diamond-Like Carbon is investigated as an answer for a low-Z material that can survive target chamber pump-down and laser prepulse. DLC was produced using Plasma-Enhanced Chemical Vapour Deposition, using with varying gas flow mixtures of argon and methane. The methane plasma deposits amorphous carbon onto the substrate and the argon plasma re-sputters the weakly bonded carbon leaving a high proportion of diamond-like bonding. Bonding natures were probed using Raman spectroscopy; analysis of the resulting spectrum showed that flow rates of 40sccm/60sccm methane to argon produced DLC films with a diamond-like (sp 3) content of ~20%. Increasing the methane gas flow decreased this value to less than 5%. DLC foils were processed into laser targets by method of float off; using a sodium chloride release layer and lowering into water, this was then lifted onto an array of apertures allowing for laser irradiation of the material with no backing. DLC with 20% sp 3 content showed superior yield when compared to other materials such as metals and some plastics of the same thickness, with ~70% of the target positions surviving the float off procedure at <10nm. As a result of this work DLC targets have been available for a number of experiments at the Central Laser Facility.
Diamond deposition on AlN using Q-carbon interlayer through overcoming the substrate limitations

Saif Taqy,Pallab Sarkar,Abdul Hamid,Tarik Pranto,Edwin L. Piner,Ravi Droopad,Ariful Haque,Md Abdul Hamid

DOI: https://doi.org/10.1016/j.carbon.2024.118809

IF: 10.9

2024-01-15

Carbon

Abstract:Q-carbon, a quenched form of carbon, is a recently discovered carbon structure that has tremendous properties, compatibility, and potential for use in device fabrication and other electronic and mechanical applications. However, the non-equilibrium nature of the synthesis process and a very small window of growth parameters have limited the formation of Q-carbon to only low thermal conductive substrates. This study aims to overcome these limitations through extensive tuning of the parameters of diamond-like-carbon (DLC), the base structure required for the formation of Q-carbon. The as-deposited DLC films demonstrate I D /I G ratios ranging from 0.12 to 1.67, which are obtained through the optimization of laser energy density, rep rate, and deposition temperature during pulsed laser deposition. Utilizing Simulation of Laser Interaction with Materials, pulsed laser annealing (PLA) was used to directly transform the DLC films into Q-carbon while varying the PLA energy density from 0.3 J/cm 2 to 1.2 J/cm 2 . Findings of Q-carbon formation on sapphire using different DLC films assisted in the preparation of a roadmap for overcoming the substrate limitations for Q-carbon formation. Further, Q-carbon is formed on AlN substrates for the direct deposition of diamond films without the requirement of a non-carbon interfacial layer or nanodiamond seeding layer. The large-area and uniform diamond growth on Q-carbon shows well-faceted and five-fold twinned growth with a 70 % improvement in the residual compressive stress of diamond on AlN. Such a method of diamond deposition on AlN provides the opportunity to address the thermal management issues in wide- and ultra-wide bandgap high-power electronic devices.

materials science, multidisciplinary,chemistry, physical
Femtosecond-laser processing incubation in Diamond-like carbon

Lucas K. Nolasco,Flávio P. Almeida,Gustavo F.B. Almeida,Juliana M.P. Almeida,Valmor R. Mastelaro,Kelly T. Paula,Cleber R. Mendonça

DOI: https://doi.org/10.1016/j.optmat.2022.112203

IF: 3.754

2022-04-01

Optical Materials

Abstract:Diamond-like carbon (DLC) has been commercialized as an advanced material for combining diamond and graphite properties with other material systems, with ease of processing and reduced costs. DLC has been broadly studied as an interesting material for applications ranging from biology to optics, passing through mechanics and electronics. Hence, for given applications, complex patterning of DLC is required, which can be accomplished by conventional lithographic approaches, as well as laser structuring. In this way, this paper focuses on studying the incubation process, the dependence of the threshold fluence with the number of irradiated pulses, on the fs-laser microstructuring of DLC films. We determined a single pulse fluence of (1.0 ± 0.1) J/cm2, a value that decreases to a plateau of (0.13 ± 0.04) J/cm2 for a large number of pulses. The slow evolution of the fluence threshold with the number of pulses indicates a low incubation parameter, such that a large number of pulses is required to damage the material. By modeling the single-pulse damage threshold fluence considering multiphoton and avalanche ionization, we were able to estimate a two-photon absorption cross-section for DLC of (1.5 ± 0.5) × 10−60 m4s1photon−1, which is consistent with the one known for diamond. Finally, Raman spectroscopy of the fs-laser processing DLC sample indicates a decrease of the sp3 fraction and a more ordered phase.

materials science, multidisciplinary,optics
Multilayer Diamond‐Like Carbon Films on Monocrystalline Diamond

Andrey Okhapkin,Mikhail Drozdov,Pavel Yunin,Stanislav Kraev,Sergey Korolyov,Dmitry Radishev

DOI: https://doi.org/10.1002/pssa.202400345

2024-07-17

physica status solidi (a) - applications and materials science

Abstract:Multilayer films of diamond‐like carbon on monocrystalline diamond substrates have been for the first time obtained by plasma‐chemical deposition. The multilayer nature of the resulting coatings is confirmed by periodic density modulation on the small‐angle X‐ray reflectometry curve and modulations in the CsC8, CsC6, CsC4 lines on the crater depth profile of secondary ions of elements. Multilayer films of diamond‐like carbon (DLC) on monocrystalline diamond substrates have been for the first time obtained by plasma‐chemical deposition. Their chemical composition and structural and morphological properties are studied. The DLC individual layers differ in their sp3 carbon content. The multilayer nature of the resulting coatings is confirmed by periodic density modulation on the small‐angle X‐ray reflectometry curve and modulations in the CsC8, CsC6, CsC4 lines on the crater depth profile of secondary ions of elements (secondary ion mass spectrometry). The dependence of the deposition rate of multilayer DLC films on diamond, their composition and properties on the argon additive to the reaction gas mixture, as well as on methane flow, pressure and growth time, are studied.
Wear-resistance of Diamond-like Carbon Thin Films Deposited on the Metal Seal Ring Surface by Plasma Gun at an Atmospheric Pressure

Chen Fei,Chen Jiaqing,Zhang Yuefei,Lv Fanxiu

DOI: https://doi.org/10.3969/j.issn.0254-0150.2010.12.008

2010-01-01

Abstract:At atmospheric pressure,Diamond-like Carbon(DLC)thin films were deposited on the metal seal ring surface by a dielectric barrier discharge(DBD)plasma gun at low temperature(<350 ℃),with CH4 as a precursor and Ar as dilution gas.The structure of the DLC thin film was analyzed by Laser Raman spectroscope.The surface morphology was observed through Atomic Force Microscope(AFM).The adhesion between the DLC thin film and the substrate was investigated with the scribe testing.The morphology of the scratch was observed by the Scanning Electron Microscope(SEM).The friction and wear behavior of the DLC thin film under dry sliding against GCr15 steel was evaluated on a ball-on-disc test rig.The results show that the thickness and surface roughness of the prepared DLC thin film by plasma gun are 500 nm and 5～6 nm respectively.The adhesion between the DLC thin film and the substrate is 49 N.The DLC thin film has excellent friction reducing and antiwear behaviors.The friction coefficient of the 20CrNiMo substrate is about 0.65 under dry sliding,while the DLC thin film experienced much abated friction coefficient to 0.148 under the same testing condition.
Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

KK CHAN,SRP SILVA,GAJ AMARATUNGA

DOI: https://doi.org/10.1016/0040-6090(92)90526-h

IF: 2.1

1992-01-01

Thin Solid Films

Abstract:Semiconducting diamond-like carbon-diamond (DLC-diamond) films were deposited by r.f. plasma-enhanced chemical vapour deposition (PECVD) at room temperature. The source gas was a mixture of methane and argon and the substrates used were n type {100} silicon. The films are found to be semiconducting with a variable band gap from 1.2 to 4.0 eV which can be controlled by changing the deposition conditions. Rectifying DLC-carbon/silicon heterojunction diodes were fabricated. The undoped films are intrinsically p type with a deep acceptor level at about 0.34 eV from the top of the valence band. A typical resistivity is of the order of 106−108 ohm cm with a breakdown strength of 10 MV cm−1.The built-in potential at the DLC-diamond-silicon junction is 0.49 V. The photoresponse of the heterojunction diode was also characterized. Some preliminary results which show that DLC-diamond has potential as a band gap modulated multilayer material are also presented.
Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

JI Peiyu,YU Jun,Tianyuan HUANG,JIN Chenggang,YANG Yan,Lanjian ZHUGE,WU Xuemei,Peiyu JI,Jun YU,Chenggang JIN,Yan YANG,Xuemei WU

DOI: https://doi.org/10.1088/2058-6272/aa94bd

2018-01-04

Plasma Science and Technology

Abstract:A high growth rate fabrication of diamond-like carbon (DLC) films at room temperature was achieved by helicon wave plasma chemical vapor deposition (HWP-CVD) using Ar/CH4 gas mixtures. The microstructure and morphology of the films were characterized by Raman spectroscopy and scanning electron microscopy. The diagnosis of plasma excited by a helicon wave was measured by optical emission spectroscopy and a Langmuir probe. The mechanism of high growth rate fabrication for DLC films by HWP-CVD has been discussed. The growth rate of the DLC films reaches a maximum value of 54 μm h−1 at the CH4 flow rate of 85 sccm, which is attributed to the higher plasma density during the helicon wave plasma discharge. The CH and Hα radicals play an important role in the growth of DLC films. The results show that the Hα radicals are beneficial to the formation and stabilization of C=C bond from sp2 to sp3.

physics, fluids & plasmas
Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

K. J. Koivusaari,J. Levoska,S. Leppävuori

DOI: https://doi.org/10.1063/1.369057

IF: 2.877

1999-03-01

Journal of Applied Physics

Abstract:In the pulsed-laser deposition process, high intensity laser pulses expel material from a solid target and form expanding plasma near the solid surface. The expansion of the plasma produces a forward-directed beam of ionized and neutral species with typical energies of 1–100 eV. In this study, amorphous diamond-like carbon (DLC) thin films were deposited onto silicon substrates at room temperature using an XeCl excimer laser (wavelength 308 nm, pulse length 20 ns) with laser fluences in the range 5–45 J cm−2, on a pyrolytic graphite target. The effect of laser fluence on the velocity and kinetic energy distribution of carbon ions was measured by time-of-flight (TOF) spectrometry using a system based on a Faraday cup with biased grids, and a multichannel plate based particle detector. We have found high kinetic energies, up to 500 eV, for expelled atomic species. In order to study the effect of the energy of the arriving ions on the structure of DLC, the bonding of carbon atoms in films, deposited under similar conditions as in the TOF measurements, was studied by x-ray absorption near-edge structure.

physics, applied

The Development of Ultra-Fast Pulse Laser Deposition of Diamond-Like Carbon Films

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

A review on diamond-like carbon films grown by pulsed laser deposition

Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition

Properties of DLC Films Produced by Pulsed Laser Induced Arc Deposition

Diamond-like Carbon Films Deposited by Femtosecond Laser Pulses

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Effects of deposited particle energy on the structure and properties of diamond-like carbon films

Diamond-like Carbon Film on 20 CrNiMo Steel Prepared by Hollow-Cathode Glow Discharge

Diamond-Like Carbon Thin Films Deposited On Ti6al4v Alloy Surface By Plasma Gun At Atmospheric Pressure

Diamond-like Carbon Film Synthesized by Ion Beam Assisted Deposition and Its Tribological Properties

Research Progress of Metal Doped Diamond-like Carbon Films

Characterisation of Diamond-Like Carbon (DLC) laser targets by Raman spectroscopy

Diamond deposition on AlN using Q-carbon interlayer through overcoming the substrate limitations

Femtosecond-laser processing incubation in Diamond-like carbon

Multilayer Diamond‐Like Carbon Films on Monocrystalline Diamond

Wear-resistance of Diamond-like Carbon Thin Films Deposited on the Metal Seal Ring Surface by Plasma Gun at an Atmospheric Pressure

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Mechanism of high growth rate for diamond-like carbon films synthesized by helicon wave plasma chemical vapor deposition

Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films