Diamond-like Carbon Films Deposited by Femtosecond Laser Pulses

Yanlong Guo,Xiao Yuan,Shuyun Wang,Changyong Lu,Xiaobing Wang,Yong Cheng,Haiyuan Cao,Xu Liu
DOI: https://doi.org/10.1117/12.757418
2007-01-01
Abstract:Hydrogen-free DLC films has been deposited by femtosecond laser pulse onto (1 0 0) p-type silicon substrates. The laser used for deposition has a pulse energy from 0.4mJ to 1.6mJ and pulse width of about 50 fs with the repetition rate of 1 kHz. The laser intensities on the target are from 0.7 x 10(14) W/cm(2) to 2.8 x 10(14) W/cm(2). Uniform and wear-resistant DLC films is deposited with fs laser ablating a high purity graphite target at room temperature in vacuum. It is shown that the films has a good hardness ranged from 20 GPa to 30 GPa. Raman spectroscopy, X-ray Photoelectron Spectroscopy and micro-hardness are used to analyze the comprehensive performance of the films, and the results show that the films deposited at the laser intensity of 1.4 x 10(14)W/cm(2) has better hardness and a higher sp(3) content. The sp(3) fraction of the films is estimated to be as high as 45.6%.
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