Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

Single-shot Laser-Induced Damage Threshold of Free-Standing Nanometer-Thin Diamond-Like Carbon Foils

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Laser-induced damage thresholds of ultrathin targets and their constraint on laser contrast in laser-driven ion acceleration experiments

Laser-induced damage thresholds of ultrathin targets and their constrain on laser contrast in laser-driven ion acceleration experiments

Femtosecond-laser processing incubation in Diamond-like carbon

Laser Modification and Damage on Diamond-Like Carbon Films

Thermal Shock Effect on Diamond-Like Carbon Thin Films Induced by Pulsed-Laser

Diamond-like Carbon Films Deposited by Femtosecond Laser Pulses

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Wear-resistance of Diamond-like Carbon Thin Films Deposited on the Metal Seal Ring Surface by Plasma Gun at an Atmospheric Pressure

Characterisation of Diamond-Like Carbon (DLC) laser targets by Raman spectroscopy

Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Deposition of Diamond-Like Carbon Films with Femtosecond KrF Laser Pulses

Laser Induced Damage for Diamond Films

Nanosecond pulsed laser-processing of CVD diamond

Temporal Scaling Law and Intrinsic Characteristic of Laser Induced Damage on the Dielectric Coating

Laser Engineering Nanocarbon Phases within Diamond for Science and Electronics

Characterization of manufacturing-induced surface scratches and their effect on laser damage resistance performance of diamond fly-cut KDP crystal

Fracture Resistance Enhancement of Diamond-Like Carbon/nitrogenated Diamond-Like Carbon Multilayer Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

Laser damage testing of CVD-grown diamond windows