Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

Preparation of Self-Supporting Diamond-Like Carbon Nanofoils with Thickness Less Than 5 Nm for Laser-Driven Ion Acceleration

Efficient Ion Acceleration by Collective Laser-Driven Electron Dynamics with Ultra-Thin Foil Targets

Characterisation of Diamond-Like Carbon (DLC) laser targets by Raman spectroscopy

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Fabrication and Field Emission Properties of Diamond-Like Carbon Nanostructure Arrays Deposited by Filtered Cathodic Vacuum Arc

Single-shot Laser-Induced Damage Threshold of Free-Standing Nanometer-Thin Diamond-Like Carbon Foils

Femtosecond-laser processing incubation in Diamond-like carbon

Laser-Driven Particle Acceleration Utilizing Nm-Thin Diamond Foils: Improved Ion Acceleration For Cancer Therapy, Improved Electron Acceleration And Potentially Ultra-Brilliant X-Ray Beams For Medical Diagnostics

Target fabrication for laser-ion acceleration research at the Technological Laboratory of the LMU Munich

Field Emission from Nanodiamonds Embedded Diamond-Like Carbon Films

Diamond-like Carbon Film on 20 CrNiMo Steel Prepared by Hollow-Cathode Glow Discharge

Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

Diamond-Like Carbon Thin-Film Deposition Using A Magnetically Confined Rf Pecvd System

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Electron-Beam Defined Delamination and Ablation of Carbon-Diamond Thin-Films on Silicon

Diamond-Like Carbon Thin Films Deposited On Ti6al4v Alloy Surface By Plasma Gun At Atmospheric Pressure

Laser micromachining of sputtered DLC films

On the Small Divergence of Laser-Driven Ion Beams from Nanometer Thick Foils

Diamond-like Carbon Thin Films Prepared by ECR Argon Plasma Assisted Pulsed Laser Deposition

Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating