Field Emission from Nanodiamonds Embedded Diamond-Like Carbon Films

Xie, W.G.,Chen, Jian,Deng, S.Z.,Xu, N.S.
DOI: https://doi.org/10.1109/ivnc.2006.335218
2006-01-01
Abstract:In this paper, nanodiamonds embedded diamond-like carbon films were fabricated. Nanodiamonds were dispersed onto silicon wafer by dielectrophoresis technique while the DLC films were deposited using magnetic filtered cathodic vacuum arc (MFCVA) technique. Surface inhomogeneity of morphology, contact potential and resistance of the films were studied by using scanning electron microscopy, Raman spectroscopy, and Omicron AFM/STM system under ultra-high vacuum technique
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