Study of Field Electron Emission from Nanocrystalline Diamond Thin Films Grown from A N-2/Ch4 Microwave Plasma

NS Xu,J Chen,SZ Deng,KH Wu,EG Wang

DOI: https://doi.org/10.1088/0022-3727/33/13/302

2000-01-01

Abstract:Nitrogen containing nanocrystalline diamond films have been synthesized by microwave plasma enhanced chemical vapour deposition using N-2/CH4 as the reactant gas. The films prepared under different N-2/CH4 flow ratios were studied by scanning electron microscopy, transmission electron microscopy, x-ray diffraction and secondary ion mass spectroscopy. Their field emission characteristics, i.e. both the distribution of the emission sites and current-voltage characteristics, were recorded using a transparent anode technique. It was found that the grain size of films prepared under different conditions varies and has a relationship with their turn-on fields. A possible explanation is given, which proposes that nanocrystalline boundary induced defect states might affect the field emission characteristics.