A Study of Field Electron Emission Phenomenon Associated with Amorphous Diamond Thin Films

J Chen,AX Wei,SZ Deng,Y Lu,XG Zheng,DH Chen,D Mo,SQ Peng,NS Xu
DOI: https://doi.org/10.1116/1.589884
1998-01-01
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena
Abstract:Experiments have been carried out to study the field electron emission phenomenon associated with amorphous diamond thin films prepared by magnetic field filtered carbon ion deposition under different nitrogen partial pressures. A transparent anode imaging technique was used to record the spatial distribution of individual emission sites and the total emission current-voltage characteristics of the films. The influence of nitrogen doping level on the emission characteristics is discussed.
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