Electron Field Emission From Different Sp(3) Content Diamond-Like Carbon Films
Dong-sheng Mao,Jun Zhao,Wei Li,xin wang,Xiang-huai Liu,Yu-kun Zhu,Jiang-yun Zhou,Zhong Fan,Qiong Li,Jing-fang Xu
DOI: https://doi.org/10.1088/0256-307X/16/2/027
1999-01-01
Chinese Physics Letters
Abstract:Different sp(3) content diamond-like carbon films are deposited on to highly n-doped Si(111) substrates by a new plasma deposition technique-filtered are deposition. Their electron field emission properties are studied by using a simple diode structure. It is showed that the turn-on field is decreased and field emission current density is increased with the increasing sp3 content (75-80%, 80-83%, and 88-90%) of the films. Field emission current of 0.1 mu A from the three samples was detected under the electric field of 10.1, 5.6, and 2.9 V/mu m and emission current density of 4.4, 15.2, and 43.2 mu A/cm(2), respectively, under 14.3 V/mu m. Fowler-Nordheim (F-N) plots of the three samples nearly show of lineaity indicating that electron field emission obeys F-N theory.