Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

Thermal Shock Effect on Diamond-Like Carbon Thin Films Induced by Pulsed-Laser

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Single-shot Laser-Induced Damage Threshold of Free-Standing Nanometer-Thin Diamond-Like Carbon Foils

Laser Induced Damage for Diamond Films

Laser Modification and Damage on Diamond-Like Carbon Films

Thermal and Mechanical Breakage Induced by High Power Laser on Optical and Photoelectric Elements

Effects of pulsed laser processing on structural evolution of diamonds - A molecular dynamics and experimental study

Molecular Dynamics Simulation Of Ultra-Fast Thermal Transition In Thin Foil Irradiated By High Power Ultra-Short Laser

Combined Continuum-Atomistic Modeling of Ultrashort-Pulsed Laser Irradiation of Silicon

Laser-Induced Damage Initiation and Growth of Optical Materials

Effect of the Thickness of A Diamond-Like Carbon Layer on the Local Temperature Increase in A Multilayered Structure Induced by Laser Heating

Calculation of Thermal and Mechanical Effect Induced by Laser in Optical Window Materials

Three-dimensional Laser-Induced Thermal and Stress Analyses in Diamond/znse System

Influence of Surface Cracks on Laser-Induced Damage Resistance of Brittle Kh2po4 Crystal

Laser damage evolution by defects on diamond fly-cutting KDP surfaces

Surface damage evolution of KDP crystals induced by conical cracks under irradiation of nanosecond laser

Study of Laser-Irradiated Thin Films

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Numerical Analysis of the Thermal and Mechanical Effects of Laser Windows of a High-Power All-Solid-state 2-Μm Laser System

Deposition of Diamond-Like Carbon Film by Ultrashort Pulsed Excimer Laser

Nanosecond pulsed laser-processing of CVD diamond