DEPOSITION OF DIAMOND-LIKE AND OTHER SPECIAL COATINGS BY PULSED LASER ABLATION AND THEIR POST-SYNTHESIS PROCESSING

S.B. Ogale,A.P. Malshe,S.M. Kanelkar
DOI: https://doi.org/10.1080/10426919308934812
IF: 4.7832
1993-01-01
Materials and Manufacturing Processes
Abstract:Use of pulsed laser ablation technique for deposition of diamond-like and other special coatings is discussed here at length, establishing the correlation between the process parameters and the film quality. Process parameters dealt with sufficient detail are the laser wavelength, laser pulse width and energy density, nature of ambient and the corresponding partial pressure, substrate temperature and the electric field, if any, applied during deposition. The optimum parameter space for deposition of films having high performance features are identified in the case of diamond-like films and films of cubic boron nitride, titanium nitride and tungsten carbide. In this context, results on the characterization of the films deposited under different conditions are discussed. These include data obtained by Raman spectroscopy, IR spectroscopy, X-ray diffraction, ellipsometry, UV-VIS transmission, scanning electron microscopy. The post-synthesis of the laser deposited films using ion and laser beams from I he standpoint of enhancing their quality or etching of dielectric features therein are also discussed.
materials science, multidisciplinary,engineering, manufacturing
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