Abstract:Ultra-short pulse laser interaction with diamond materials has attracted extensive interest in micro- and nano-machining, especially for the fabrication of micro tools, because of the straightforward method and high precision. Thanks to the development of chemical vapor deposition (CVD) technology, high-quality CVD diamonds are employed in more varieties of tools as performance-enhancing coatings. The purpose of the experiments reported here was to explore the machinability of CVD diamond coating under the irradiation of femtosecond (fs) pulsed laser. The factor-control approach was adopted to investigate the influence of scanning speed, single pulse energy and repetition rate on the surface quality and carbon phase transition of CVD diamond coating. The material removal rate and surface roughness were evaluated. The interaction mechanism of scanning speed, single pulse energy, and repetition rate were discussed, and the fs laser ablation threshold of CVD diamond coating was calculated. It was demonstrated that two ablation mechanisms (weak and intensive) were in existence as evidenced by the distinct surface morphologies induced under different processing conditions. A strong dependence on the variation of scanning speed and pulse energy is identified in the examination of surface roughness and removal rate. Lorentzian–Gaussian deconvolution of Raman spectra illustrates that fs laser irradiation yields a strong modification effect on the coating and release the compressive stress in it. Furthermore, a newly defined parameter referring to the fs laser energies applied to unit volume was introduced to depict the degree of ablation and the Taguchi method was used to figure out the significance of different parameters. The ablation threshold of CVD diamond coating at the effective pulses of 90 is calculated to be 0.138 J/cm2.

Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method

Preparation of Anti-Reflective and Protective Diamond-Like Carbon Film on Si Substrate by Femto-Second Pulsed Laser Deposition

Resonant Excitation of Ethylene Molecules in the Combustion Flame CVD of Diamond Using a Wavelength Tunable CO 2 Laser

Spectroscopic Determination of Rotational Temperature in C2H4/C2H2/O2 Flames for Diamond Growth with and Without Tunable CO2 Laser Excitation.

Excitations of Precursor Molecules by Different Laser Powers in Laser-Assisted Growth of Diamond Films

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Laser-power-resolved Excitations of Ethylene Molecules in Laser-Assisted Synthesis of Diamond Films

A Study of Diamond-Like Carbon Thin Films Prepared by Microwave Plasma Chemical Vapour Deposition

Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

Diamond-like Carbon Thin Films Prepared by ECR Argon Plasma Assisted Pulsed Laser Deposition

Research on Excimer Laser Induced Chemical Vapor Deposition of Diamond Films

Electron-Beam Defined Delamination and Ablation of Carbon-Diamond Thin-Films on Silicon

Growth of well-adhered and smooth diamond thin films on fused silica substrates

Optical and Electrical Properties of Diamond-like-Carbon Coatings Prepared by Electron Cyclotron Resonance Ion Beam Deposition Process

Highly Transparent Nanocrystalline Diamond Films On Quartz Substrates

Mechanical properties of high-crystalline diamond films grown via laser MPCVD

A review on diamond-like carbon films grown by pulsed laser deposition

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

Structure and Optical Characteristics of DLC Films

Laser-assisted Chemical Vapor Deposition of Diamond Films

Tribological Properties of Diamond-Like Carbon Films Deposited by Pulsed Laser Arc Deposition