Abstract:Ultra-short pulse laser interaction with diamond materials has attracted extensive interest in micro- and nano-machining, especially for the fabrication of micro tools, because of the straightforward method and high precision. Thanks to the development of chemical vapor deposition (CVD) technology, high-quality CVD diamonds are employed in more varieties of tools as performance-enhancing coatings. The purpose of the experiments reported here was to explore the machinability of CVD diamond coating under the irradiation of femtosecond (fs) pulsed laser. The factor-control approach was adopted to investigate the influence of scanning speed, single pulse energy and repetition rate on the surface quality and carbon phase transition of CVD diamond coating. The material removal rate and surface roughness were evaluated. The interaction mechanism of scanning speed, single pulse energy, and repetition rate were discussed, and the fs laser ablation threshold of CVD diamond coating was calculated. It was demonstrated that two ablation mechanisms (weak and intensive) were in existence as evidenced by the distinct surface morphologies induced under different processing conditions. A strong dependence on the variation of scanning speed and pulse energy is identified in the examination of surface roughness and removal rate. Lorentzian–Gaussian deconvolution of Raman spectra illustrates that fs laser irradiation yields a strong modification effect on the coating and release the compressive stress in it. Furthermore, a newly defined parameter referring to the fs laser energies applied to unit volume was introduced to depict the degree of ablation and the Taguchi method was used to figure out the significance of different parameters. The ablation threshold of CVD diamond coating at the effective pulses of 90 is calculated to be 0.138 J/cm2.

Research on Excimer Laser Induced Chemical Vapor Deposition of Diamond Films

Laser-assisted Chemical Vapor Deposition of Diamond Films

Highly Transparent Nanocrystalline Diamond Films On Quartz Substrates

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Photochemical modification of a diamond surface using a pulsed UV laser as the energy source

Diamond-Like Carbon Thin-Film Deposition Using A Magnetically Confined Rf Pecvd System

High quality nanocrystalline diamond films grown by RF-HFCVD

Characterization of diamond thin films deposited by a CO2 laser-assisted combustion-flame method

Study on Femtosecond Laser Processing Characteristics of Nano-Crystalline CVD Diamond Coating

Characteristics of Diamond Crystals Deposited on Quartz Substrates by Chemical Vapor Deposition

Morphologies and structures of chemical vapor deposited diamond films and film-substrate interfaces

Electron-Beam Defined Delamination and Ablation of Carbon-Diamond Thin-Films on Silicon

Crystalline Diamond Growth in Thin Films Deposited from a CH4/Ar Rf Plasma

Laser-power-resolved Excitations of Ethylene Molecules in Laser-Assisted Synthesis of Diamond Films

Diamond-like Carbon Thin Films Prepared by ECR Argon Plasma Assisted Pulsed Laser Deposition

Pulsed-laser deposition of diamond-like carbon: Relations between laser fluence, velocity of carbon ions, and bonding in the films

Nanosecond pulsed laser-processing of CVD diamond

Molecular dynamics simulation of laser-induced graphitization of CVD diamond

Resonant Excitation of Ethylene Molecules in the Combustion Flame CVD of Diamond Using a Wavelength Tunable CO 2 Laser

Spectroscopic Study on the Evolution of Graphite Ablation Plume in ECR Argon Plasma During the Deposition of Diamond-Like Carbon Films

Diamond Nucleation on Unscratched Silicon Substrates Coated with Various Non-Diamond Carbon Films by Microwave Plasma-Enhanced Chemical Vapor Deposition