Effects of Gate Metal Work Function and Line Edge Roughness on the Variability of Junctionless Field-Effect Transistor

Xinhe Wang,Bin Gao,Jianshi Tang,Zhigang Zhang,Huaqiang Wu,He Qian
DOI: https://doi.org/10.1109/edtm53872.2022.9798275
2022-01-01
Abstract:This work investigates the influence of both gate metal work function variation (WFV) and line edge roughness (LER) on the electrical characteristics of junctionless field-effect transistors (JL-FETs) through 3D TCAD simulations. The work function variation of the metal is measured by Kelvin Probe Force Microscopy (KPFM) in atomic force microscope (AFM). It found that the effect of the roughness perpendicular to the channel is more significant than that parallel to the channel. The main reason is that the V th of the JL-FET is more sensitive to their channel radius due to its unique working mechanism.
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