Effects of Gate Metal and Channel Shape on the Variability of Junctionless Field-Effect Transistor

Xinhe Wang,Feng Xu,Zhigang Zhang,Xinyi Li,Jianshi Tang,Bin Gao,Huaqiang Wu,He Qian
DOI: https://doi.org/10.1109/cstic55103.2022.9856714
2022-01-01
Abstract:This work comprehensively investigates the influence of gate metal work function and its grain size variations as well as channel shape on the electrical characteristics of junctionless field-effect transistors (FETs) through 3D TCAD simulations. It is found that, for a certain gate length, the smaller the gate metal grain size, the more compact the distribution of the threshold voltage. Two different channel shapes concerning ellipse and cuboid are further analyzed.
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