Study on the oxygen diffusion in the oxide layers of SiBCN ceramics by SIMS

Meng Zhang,Daxin Li,Yuzhe Hong,Zibo Niu,Zhihua Yang,Dechang Jia,Yu Zhou
DOI: https://doi.org/10.1016/j.jeurceramsoc.2021.12.020
IF: 5.7
2022-01-01
Journal of the European Ceramic Society
Abstract:•The oxide layer of SiBCN can be divided into outer and inner parts under 1300 °C.•The oxygen molecules diffused in SiC through the gaps in lattice, while diffused in SiBCN by substituting the O in SiO2.•BN(C) phase in SiBCN can slow down the generation rate of gases such as CO, N2, NO2 and B2O3.
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