Preparation method of surface conduction electron-emitter film with Nb-Si-N nanometer bi-phase structure

Chunliang Liu,Luping Liu,Lingzhi Ma,Yanhui Shi,Zhongxiao Song,Huiyan Wu,Shengli Wu,Kewei Xu,Qingwen Yue
2010-01-01
Abstract:The invention relates to a surface conduction electron-emitter film material, and discloses a preparation method of a surface conduction electron-emitter film with an Nb-Si-N nanometer bi-phase structure. The preparation method comprises the following steps of: taking a glass as a substrate in the atmosphere of N2/Ar mixing gas, synchronously carrying out the reaction magnetron sputtering on an Nb target and a Si target for deposition and generating a surface conduction electron-emitter film with the Nb-Si-N nanometer bi-phase structure having an NbN conductive phase and a SiNx insulating phase.
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