Surface-conduction electron emission from Nb-Si-N thin film

SiLiang Xiong,Zhongxiao Song,ShengLi Wu,LingGuo Zhao,Jun Wang,H. Y. Wu,Chunliang Liu
2009-01-01
Abstract:We propose to sputter a new ternary material Nb-Si-N as the conductive film. With this ternary film composition, the film's sheet resistance can be adjusted easily to satisfy the requirement of the electro-forming process. The experiment results show that Nb-Si-N can be a kind of conductive film material for SCEs.
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