Laminated film and method for manufacturing waveform contour controlled surface conduction electron emission source of laminated film

Hongzhong Liu,Yucheng Ding,Bangdao Chen,Fan Fan,Bingheng Lu
2012-01-01
Abstract:The invention discloses a laminated film and a method for manufacturing a waveform-contour controlled surface-conduction electron emission source of the laminated film. In the method, an electron emission source array with in-plane waveform boundary films is prepared on a glass substrate by using the processes of ultraviolet (UV) overprint photoetching, magnetron sputtering and film stripping, and the like, wherein the distance between an upper film and a lower film is controlled between 10 nm and 200nm by a film on an insulating layer, and voltages are applied between the upper film and the lower film so as to realize the production of an electron tunneling effect on a contour between the films; and the waveform structure of the contour of the films can improve the circumference of the emission source, and increase the electron emission quantity.
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