Fabrication Technologies of Surface-Conduction Electron-Emitter Display

Ting Liu,Ziyun Zhou,Shengli Wu,Wenbo Hu
DOI: https://doi.org/10.3969/j.issn.1672-7126.2012.05.11
2012-01-01
Abstract:We addressed the fabrication and vacuum sealing technologies of the cathode and anode for the surface conduction electron emitter display device. The cathode array were fabricated in three steps: first, the Pt films were grown by magnetron sputtering on glass substrate, followed by lithography; next, thick Ag films were deposited by screen printing; and finally, the conductive PdO films were coated to ease the sealing requirements. After sealing and degassing at 340°C for 2 h in vacuum, the nano-scaled gaps, formed in-situ by Joule heating of the saw-tooth shaped current applied to the conductive coatings, act as the electron emission source. The tested results show that the cathode-array of the lab-made, prototyped SEM are capable of emitting a fairly uniform pattern of light.
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