Modulation Effect of Reducing Time on Switching Speed in AlOx/WOx RRAM

Juan Xu,Yarong Fu,Yinyin Lin
DOI: https://doi.org/10.13290/j.cnki.bdtjs.2017.09.002
2017-01-01
Abstract:Based on the 128 kbit test macro of AlOx/WOx bi-layer resistive random access memory (RRAM) chip,the modulation effect of the reducing time on the RRAM switching speed was proposed and verified.An extending pulse width with fixed voltage amplitude testing algorithm was designed for RRAM array speed test.Longer reducing time leads to a faster switching speed of the chip due to thinner AlOx layer and more oxygen vacancy content in AlOx layer which could accelerate the formation,rupture and reconnection of conductive filament.The experimental results show that by increasing the reducing time from 10 min to 30 min,the mean value of the FORMING speed distribution is reduced from 200 ns to 120 ns under 4 V and from 100 ns to 60 ns under 4.5 V.The mean value of the RESET speed distribution is reduced from 160 ns to 120 ns under 4 V and from 120 ns to 100 ns under 4.5 V.The mean value of the SET speed distribution is reduced from 120 ns to 100 ns under 4 V.Furthermore,longer reducing time can improve the uniformity of speed distribution and decrease speed variation.
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