Resisitive Switching Variability Study on 1T1R AlOx/WOx-based RRAM Array

Bin Jiao,Ning Deng,Jie Yu,Yue Bai,Minghao Wu,Ye Zhang,He Qian,Huaqiang Wu
DOI: https://doi.org/10.1109/edssc.2013.6628071
2013-01-01
Abstract:Resistive random access memories (RRAM) often show large variation due to the stochastic nature of the switching process. Bilayer AlOx/WOx based RRAM cells were investigated for key parameters variations. Those AlOx/WOx memory devices were fabricated in a commercial CMOS foundry. Yield of forming process is studied with different transistor size and forming voltage. The tradeoff between array size, speed and power consumption are discussed.
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