A Novel Electrical Isolation Solution for Tunnel FET Integration

Ting Li,Qianqian Huang,Le Ye,Yuan Zhong,Mengxuan Yang,Yiqing Li,Yimei Li,Zhongxin Liang,Ru Huang
DOI: https://doi.org/10.1109/CSTIC49141.2020.9282556
2020-01-01
Abstract:In this work, for bulk tunnel field-effect transistors (TFET), the electrical isolation solutions between neighboring devices for TFET integration are investigated. To suppress the leakage current of the P-type doped regions through the P-type substrate, a new effective isolation method is proposed and verified via simulation. The simulation shows the leakage current can be reduced from 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-5</sup> A/μm to 10 <sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">-13</sup> A/μm. The solution is beneficial for TFETs to keep its advantages for ultra-low power applications such as implantable medical devices and Internet of Things.
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