Abstract:By adopting polymer/silica hybrid rib waveguide structure,a low power-consumption Mach-Zehnder interferometer(MZI) thermo-optic switch is designed and fabricated with techniques including chemical vapor deposition(CVD),spin-coating,wet-etching,etc.The wavelength dispersions of waveguide core,buffer and cladding materials are measured,and output power and output spectrum are theoretically analyzed.Switching response and spectrum characteristics are measured using a tunable laser as input source.Under 1 550 nm wavelength,the driving power of the switch is about 7.8 mW,the extinction ratio between ON state and OFF state is up to 32.6 dB,and under the function of pure square-wave switching signal(peak-to-peak amplitude of 3Vpp),the rising time and falling time are 107 μs and 71 μs,respectively.Keeping applying the driving power at 1 550 nm wavelength on the device,the measured spectrum width is about 50 nm(1 520-1 570 nm) with an extinction ratio over 18 dB.A noise-level-tunable driving source is developed with NE555 and other integrated circuits,and then the driving-noise-tolerance characteristics are investigated.Experimental results indicate that the allowed maximum noise-level is about 1.1 Vpp with a required extinction ratio larger than 10 dB.The proposed results in this paper are of good meanings for practical applications of such thermo-optic switches with the hybrid waveguide structure.

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