Rapid start-up control of high Q-factor MEMS gyroscope

陈志勇 Chen Zhi-yong,宋 霖 Song Lin,张 嵘 Zhang Rong,周 斌 Zhou Bin,魏 琦 Wei Qi

DOI: https://doi.org/10.3788/ope.20182605.1070

2018-01-01

Optics and Precision Engineering

Abstract:The control method of the drive axis was investigated with the goal of rapid startup of the MEMS gyroscope with a high Q-factor .The change rate of the vibration phase of the high Q-factor resonator with frequency was analyzed ,and the reason for the long starting time of the phase-locked loop scheme in addition to its sensitivity to the initial frequency deviation was elucidated . The variation rule of the amplitude at the initial stage of the self-excited oscillation scheme with time was deduced by using the averaging method .A control scheme that combines the self-exited oscillation loop and the phase-locked loop (SEOL-PLL ) of the drive axis was proposed .The self-excited oscillation mode was used to quickly start the gyroscope ,and then the phase-locked loop was used to maintain the accuracy and stability of the vibration frequency .In the experiment ,when the initial frequency deviation of the PLL is less than ± 10 Hz ,the starting time of the gyroscope is 2 s . Whereas with the SEOL-PLL scheme ,a frequency error of 0 .01％ is achieved in 0 .3 s and an amplitude error of 0 .1％ is achieved in 0 .4 s ,as long as the initial frequency deviation is within ± 1000 Hz .The "SEOL-PLL" solution considerably reduces the start-up time and is insensitive to the initial frequency deviation of the gyroscope .It is therefore suitable for the mass production of MEMS gyroscope and has a good adaptability to ambient temperature change .