Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

Constant-frequency Oscillation Control for Vibratory Micro-Machined Gyroscopes

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Analysis on Digital Automatic Gain Control of MEMS Gyro Driven-Loop Circuit

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

One-time Frequency Sweep to Eliminate IQ Coupling in MEMS Vibratory Gyroscopes

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

H<sub>∞</sub>/μ Robust Control of Vibration for an Ultra-Precision Grinding Machine

An Improved Phase Lock Loop for Micromechanical Gyroscope with A Carrier Modulation

H∞/μ Robust Control of Vibration for an Ultra-precision Grinding Machine

Digital closed-loop controller design of a micromachined gyroscope based on auto frequency swept

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

Frequency Tuning Control for the Drive Mode of a Bulk Z-axis Micro-machined Gyroscope

Adaptive control of a vibratory angle measuring gyroscope

Digital Control and Performance Test of a Symmetrical Doubly Decoupled Micro-Machined Gyroscope

Improving the Scale Factor Thermal Stability of Resonant Fiber-Optic Gyroscopes by Tracking the Half-Wave Voltage of the Phase Modulator

Analysis and design of a 3rd order velocity-controlled closed-loop for MEMS vibratory gyroscopes

Force Rebalance Controller Synthesis for A Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications

Resonator Fiber Optic Gyroscope with an All Digitalized System

Optimization of the Resonant Frequency Servo Loop Technique in the Resonator Micro Optic Gyro

A New Self-Oscillation Loop for MEMS Vibratory Gyroscopes