Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

Force Rebalance Controller Synthesis for A Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications

Closed loop control design for the sense mode of micromachined vibratory gyroscopes

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Constant-frequency Oscillation Control for Vibratory Micro-Machined Gyroscopes

A Bulk Micromachined Gyroscope With Improved Quality-Factors At Atmospheric Pressure

A novel narrow-band force rebalance control method for the sense mode of MEMS vibratory gyroscopes

Digital closed-loop controller design of a micromachined gyroscope based on auto frequency swept

Force Rebalance Control for a MEMS Gyroscope Using Ascending Frequency Drive and Generalized PI Control

Digital controller design for sense mode of micro-machined gyroscope

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

Automatic Calibration and Nonlinearity Optimization for Scale Factor of MEMS Gyroscopes under Force Rebalanced Operation

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope

Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes

A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization

Design and optimization of a resonant output frequency gyroscope for robust sensitivity and bandwidth performance

Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification

A sub 0.8 degree per hour mode-matching MEMS vibratory gyroscope with closed loop control for the sense mode

Digital Control and Performance Test of a Symmetrical Doubly Decoupled Micro-Machined Gyroscope