A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes
Chuanfu Chen,Kai Wu,Kuo Lu,Qingsong Li,Chengxiang Wang,Xuezhong Wu,Beizhen Wang,Dingbang Xiao
DOI: https://doi.org/10.3390/mi13071052
IF: 3.4
2022-07-01
Micromachines
Abstract:MEMS gyroscopes play an important role in inertial navigation measurements, which mainly works in n = 2 mode. However, mode matching is the basis for high-precision detection, which can improve the sensitivity, resolution, and signal-to-noise ratio of the gyroscopes. An initial frequency split is inevitably generated during the manufacturing process. There are two methods to eliminate the frequency split and to achieve mode matching for the gyroscopes, which are electrostatic tuning and mechanical trimming, respectively. In this paper, we report a novel ring MEMS resonator and a novel method of mechanical frequency tuning. The most prominent characteristic of the resonator is that 16 raised mass blocks are increased in the circumferential positions of the ring uniformly. This structural design can achieve mass-stiffness decoupling, which means that punching holes on the mass blocks only affects the mass distribution but the stiffness is almost unchanged for the resonator. We verify the mass-stiffness decoupling by way of comparing the simulation with the conventional resonator. In addition, we put up an online tuning platform based on a femtosecond laser and reduce a resonator's frequency split from 23.3 Hz to 0.4 Hz, which reveals that the frequency split is linearly related to the removed mass. These findings will have a referential significance for other transducers.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied