Design of a Micro-Electro Mechanical System Quad Mass Gyroscope with Compliant Mechanical Amplification

Jingchuan Zhou,Dacheng Xu,Xinxin Li,Fang Chen

DOI: https://doi.org/10.3390/mi15010124

IF: 3.4

2024-01-12

Micromachines

Abstract:In this work, a novel mechanical amplification structure for a MEMS vibratory gyroscope is proposed with the aim of improving their sensitivity. The scheme is implemented using a system of micromachined V-shaped springs as a deflection amplifying mechanism. The effectiveness of the mechanism is first demonstrated for a capacitive fully decoupled quad mass gyroscope. A proof of concept vertical-axis mechanically amplified gyroscope with an amplification factor of 365% has been designed, simulated and fabricated, and results from its evaluation are presented in this paper. Experimental results show that the natural frequency of the gyroscope is 11.67 KHz, and the full scale measurement range is up to ±400°/s with a maximum nonlinearity of 54.69 ppm. The bias stability is 44.53°/h. The experiment results show that this quad mass gyroscope's performance is a very potential new way of reaching the navigation grade in the future.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

What problem does this paper attempt to address?

The problem this paper attempts to address is improving the sensitivity of micro-electromechanical systems (MEMS) vibrating gyroscopes. Specifically, the authors propose a new mechanical amplification structure aimed at enhancing the gyroscope's sensitivity by using microfabricated V-shaped springs as a deflection amplification mechanism. This mechanism was first validated on a fully decoupled four-mass capacitive gyroscope. A proof-of-concept vertical-axis mechanical amplification gyroscope with a 365% amplification factor was designed, simulated, and fabricated, and its evaluation results are presented in the paper.

The main objective of the paper is to improve the mechanical sensitivity of the gyroscope through this novel mechanical amplification structure, thereby enhancing the overall performance of the gyroscope without increasing electronic noise, making it potentially capable of meeting navigation-grade requirements in the future. Experimental results show that the natural frequency of the gyroscope is 11.67 kHz, with a full-scale measurement range of ±400°/s, a maximum nonlinearity of 54.69 ppm, and a bias stability of 44.53°/h, indicating that the performance of this four-mass gyroscope has significant potential.