A novel narrow-band force rebalance control method for the sense mode of MEMS vibratory gyroscopes

c h he,d c liu,q c zhao,yunfei en,z c yang,d c zhang,g z yan

DOI: https://doi.org/10.1016/j.measurement.2014.11.009

IF: 5.6

2015-01-01

Measurement

Abstract:Force rebalance control schematic for the sense.

What problem does this paper attempt to address?

Force Rebalance Controller Synthesis for A Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications

Jian Cui,Zhongyang Guo,Qiancheng Zhao,Zhenchuan Yang,Yilong Hao,Guizhen Yan

DOI: https://doi.org/10.1109/jmems.2011.2167663

IF: 2.829

2011-01-01

Journal of Microelectromechanical Systems

Abstract:This paper presents a design method of force rebalance control for the sense mode of a micromachined vibratory gyroscope with multiobjective. The control strategy is mainly based on constraining sensitivity margin specifications via numerical optimization approach, which embeds the sense mode in a closed-loop system to possess more robust performance. This paper also provides a quantitative methodology of configuring the system parameters to realize the functional electrostatic force feedback control for the microgyroscope in the case of nonideal coupling and external angular disturbance. Theoretical results predicted by the control loop are shown to be in close agreement with the experimental results using a practical microgyroscope, which indicated a satisfactory performance of the proposed control algorithm. The maximums of the sensitivity function and complementary sensitivity function are measured to be 4.5 and 1 dB, resulting in GM >= 7.84 dB and PM >= 35 degrees. The gyroscope achieves a scale factor of 7.1 mV/deg/s with nonlinearity of 0.2% which is improved by one order of magnitude compared with that of the open loop. The bandwidth is extended to about 98 Hz from 30 Hz in the open loop. The quadrature error and temperature stability of the scale factor are reduced from -10.33 to -59.22 dB and from 4858 to 646 ppm/degrees C with the force rebalance control, respectively.
Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Huijie Zhu,Zhonghe Jin,Shichang Hu,Wei Ma,Yidong Liu

DOI: https://doi.org/10.1109/3m-nano.2013.6737430

2013-01-01

Abstract:Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.
Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Xudong Zheng,Xuetong Wang,Yaojie Shen,Chenhao Xia,Wenyuan Tong,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1088/1361-6439/acbfc6

2023-01-01

Journal of Micromechanics and Microengineering

Abstract:We report for the first time an implementable method to identify and suppress the driving force misalignment angle for a MEMS gyroscope working either in amplitude modulated (AM) or Lissajous frequency modulated (LFM) mode using parametric excitation. By introducing driving force misalignment angle into gyroscope dynamic equations, we illustrate that gyroscope angular rate output is affected by driving force misalignment angle and cross-axis damping jointly. We propose parametric excitation as a way to both identify and calculate the driving force misalignment angle. The identification results for a gyroscope working in both AM and LFM mode are similar, which indicates the effectiveness of the proposed identification method. Instead of using traditional amplitude control loop by adjusting the driving force, we do the automatic gain control by adjusting the parametric pump voltage so that a fixed drive voltage can be used, which also indicates fixed force coupling. Experimental results show that after suppression, the bias instability (BI) of AM mode is improved from 4.7 degrees h(-1) to 2.3 degrees h(-1) and the BI of LFM mode is improved from 1.4 degrees h(-1) to 0.9 degrees h(-1) which is the lowest result reported for LFM gyroscope.
Closed loop control design for the sense mode of micromachined vibratory gyroscopes

ChunHua He,QianCheng Zhao,YuXian Liu,ZhenChuan Yang,GuiZhen Yan

DOI: https://doi.org/10.1007/s11431-013-5201-x

2013-01-01

Science China Technological Sciences

Abstract:This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory gyroscopes. Specific theoretical deductions are performed to identify a precise linear model of the open loop system of the sense mode, which is crucial for the PI controller design. The frequency responses obtained by experimental tests agree well with those calculated with the theoretical model, indicating the accuracy of the theoretical analyses. Experimental results demonstrate that the bandwidth of the closed loop is extended to 94.8 Hz from 2.3 Hz in the open loop and the quadrature signal is suppressed by about 64 dBV in the closed loop system. The overshoot and stable time in the step response of the closed loop system are measured to be about 15% and 35 ms, respectively. The mode-splitting gyroscope with the closed loop controlled sense mode achieves a scale factor of 41.0 mV/deg/s with nonlinearity of 0.09% and asymmetry of 1%, and a bias instability of 4.0 °/h with angle random walk of 0.171 deg/h 1/2 .
Fuzzy Sliding-Mode Control of the Electrostatically Tuned Quasi-Zero Stiffness MEMS Accelerometer.

Ziyi Ye,Zhipeng Ma,Yixuan Guo,Yiming Jin,Tengfei Zhang,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1109/nems54180.2022.9791170

2022-01-01

Abstract:In order to compromise between the bandwidth and the output stability of the previously proposed quasi-zero stiffness MEMS accelerometer, we proposed a novel fuzzy sliding-mode (FSM) controller that enables varying the switching force based on the observation of the position and velocity of the proof mass autonomously. The closed-loop control of the developed accelerometer which is implemented with the FSM control algorithm is evaluated in terms of the bandwidth and output stability. The results show the FSM-controlled accelerometer has a close bandwidth yet much-improved noise floor in comparison with the previously proposed proportional integral sliding mode (PISM) controlled accelerometer.
A Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring Constant

Shichang Hu,Zhonghe Jin,Huijie Zhu,Hao Wang

DOI: https://doi.org/10.1109/JMEMS.2013.2250485

2013-01-01

Abstract:This paper proposed a novel slot-structure z-axis gyroscope with a positive or negative electrostatic spring. The slot-structure gyroscope has in-plane drive and sense modes. Different from conventional comb finger structure, variable-area fixed out-of-plane electrodes under the proof-mass are used to excite the in-plane vibratory modes. To overcome the disadvantage that the resonant frequencies are unable to be adjusted through variable-area capacitors in the conventional slot-structure gyroscope, a variable-area capacitor with triangular shape fixed electrodes is designed to introduce the electrostatic tuning of the in-plane vibratory modes. A voltage difference Vt across the triangular fixed electrodes and movable electrodes produces a positive or negative electrostatic spring. The induced electrostatic spring constant is proportional to Vt2. A prototype with a positive electrostatic spring is fabricated and tested. The difference of the nature frequencies of the drive mode and sense mode is about 13.5 Hz. A 15 V Vt makes the gyroscope perfect mode matching. The scale factor of the prototype is about 72 mV/°/s when Vt is 0 V and increases with Vt. It presents a scale factor of 320.6 mV/°/s and noise density of 11.63 °/h/vHz when mode matched. Interestingly, the bandwidth of the gyroscope only slightly decreased from the initial value of 7 Hz to 4.6 Hz when mode matched, possible reasons are discussed in this paper.
A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

Xuetong Wang,Xudong Zheng,Haibin Wu,Qiongxia Pang,Yaojie Shen,Zhipeng Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/mems51782.2021.9375296

2021-01-01

Abstract:This work reports design of a dual-mode decoupled single-mass micromechanical gyroscope with a fully symmetrical structure aiming to achieve mode-matching despite of fabrication errors and packaging stress imbalance. Mode-matching is done by combing the spring-hardening effect caused by the nonlinear stiffness of the elastic beam and the linear electrostatic stiffness by applying a DC voltage to dedicated linear electrostatic tuning electrodes set on the center mass of the gyroscope. First, the mode split between gyroscope drive mode and sense mode is narrowed by a coarse frequency tuning, which combines the spring-hardening effect based on adjusting the drive oscillation amplitude to a proper value, and the downward tuning effect caused by quadrature nulling electrode. Then mode matching is achieved by applying a DC voltage on the linear electrostatic tuning electrodes. Test results of the mode-matching gyroscope using aforementioned two-step tuning is also given. The gyroscope achieves an ARW of 0.011°/√h and BI of 0.229°/h under mode matching and with quadrature error suppressed by quadrature nulling electrode.
A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Haibin Wu,Xudong Zheng,Yaojie Shen,Xuetong Wang,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1109/sensors47087.2021.9639632

2021-01-01

Abstract:The work illustrates a resonant constant-frequency (RCF) driving technique used in a MEMS gyroscope which has linear frequency-tuning triangular capacitors. Differing from that conventional driving technique where the gyroscope excitation frequency is time-varying, the RCF strategy assures that the excitation frequency and resonant frequency are equal and constant in the gyroscope drive mode by means of frequency-tuning feedback. As a result, RCF can eliminate effects of excitation-frequency instability and drift on gyroscope output performance. Combining RCF with real-time automatic mode-matching, the tested gyroscope with sense-mode quality factor of 26.75k has achieved bias instability of 0.09 °/h and angle random walk of 0.0087°/√h.
MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Yi-yu LIN,Xu-dong ZHENG,Hai-bin WU,Zhi-peng MA,Zhong-he JIN

DOI: https://doi.org/10.3785/j.issn.1008-973X.2019.09.019

2019-01-01

Abstract:A novel drive-mode control scheme for MEMS gyroscopes was presented, where the gyroscopes were parametrically excited with constant resonant frequency. The proposed control scheme enabled a constant resonant frequency excitation with parametric amplification in the drive mode via triangular parallel capacitors, to keep the resonant frequency and quality factor constant against environmental fluctuations, and to improve the gyroscope temperature performance. First, frequency tuning and parametric excitation by means of triangular capacitors were introduced. Then, a new control scheme based on parametric excitation at constant frequency was proposed and implemented. The simulation results indicate that the resonant frequency is tuned to be constant and the dive-mode vibration amplitude is controlled to be stable. Finally, the experimental results indicate that the bias instability of gyroscope was 1.69°/h, which was better than that of the traditional scheme, and the temperature drift of zero-rate output during temperature cooling down was reduced to half compared to the traditional control scheme.
Design and Test of MEMS Gyroscope Control System Based on LMSD

Shuai Guo,Xudong Zheng,Yiyu Lin,Wei Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/3m-nano.2017.8286267

2017-01-01

Abstract:In order to improve the performance of MEMS gyroscopes, the least mean square demodulation (LMSD) algorithm is utilized in MEMS gyroscope control system. By using Matlab tool, the simulation result shows that the LMSD algorithm has better noise suppression performance than multiplicative demodulation (MD). LMSD algorithm is carried out in field-programmed-gate-array (FPGA) and experimental results are in good agreement with the simulation. Combining with automatic gain control (AGC) and phase-locked loop (PLL) technology, the amplitude variance and phase variance of drive mode are respectively 62ppm and 0.001°. The nonlinearity of scale factor based on LMSD algorithm is 0.068%. Moreover, the gyroscope using LMSD exhibits a bias stability (BS) of 1.8°/h and an angle random walk (ARW) of 0.031°/Vh, better than the BS 6.7°/h and ARW 0.114°/Vh using MD. The experiment proves the feasibility and effectiveness of LMSD algorithm in the digital control system of MEMS gyroscope.
A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

Haibin Wu,Xudong Zheng,Xuetong Wang,Yaojie Shen,Zhipeng Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/jsen.2021.3110054

IF: 4.3

2021-01-01

IEEE Sensors Journal

Abstract:We propose a MEMS gyroscope system working with a fixed resonance frequency which combines resonant constant-frequency (RCF) driving and real-time automatic mode-matching technique with the help of linear tuning triangular capacitors. The special tuning capacitors are implemented in both the gyroscope drive mode and sense mode as drive-mode frequency-tuning (DFT) and sense-mode frequency-tuning (SFT), respectively. RCF assures that the drive-mode equivalent resonance frequency after tuned can keep with the given constant excitation frequency, while real-time automatic mode-matching further eliminates mismatches between the drive-mode and sense-mode equivalent resonance frequencies. As a result, the gyroscope system achieves constancy and equality of the excitation frequency and two modal resonance frequencies. Performance evaluations show that the gyroscope with the sense mode quality factor of 26.7k reaches bias instability of 0.09 degrees/h and angle random walk of 0.0087 degrees/root h under room temperature without any compensation, and is capable of detecting an angular rate as low as 0.001 degrees/s.
Force Rebalance Control for a MEMS Gyroscope Using Ascending Frequency Drive and Generalized PI Control

Chun-Hua He,Qin-Wen Huang,Qian-Cheng Zhao,Zhen-Chuan Yang,Da-Cheng Zhang,Gui-Zhen Yan

DOI: https://doi.org/10.1051/matecconf/20166305030

2016-01-01

MATEC Web of Conferences

Abstract:This paper has proposed a novel force rebalance control method for a MEMS gyroscope using ascending frequency drive and generalized PI control. Theoretical analyses of ascending frequency drive and force rebalance control methods are illustrated in detail. Experimental results demonstrate that the electrical anti-resonant peaks are located at the frequency responses in the RFD system, which seriously deteriorates the original response characteristics. However, they are eliminated in the AFD system, and the electrical coupling signal is also suppressed. Besides, as for the force rebalance control system, the phase margins approximate to 60deg, gain margins are larger than 13dB, and sensitivity margins are smaller than 3.2dB, which validates the control system is stable and robust. The bandwidth of the force rebalance control system is measured to be about 103.2Hz, which accords with the simulation result. The bias instability and angle random walk are evaluated to be 1.65deg/h and 0.06deg/√h, respectively, which achieves the tactical level.
Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

y x liu,w l feng,c h he,lingfeng wang,l g dong,q c zhao,z c yang,g z yan

DOI: https://doi.org/10.1109/NEMS.2014.6908790

2014-01-01

Abstract:This paper presents a digital closed loop control method for the sense mode of a mode-matching MEMS vibratory gyroscope. The sense closed loop system reported in our previous work is relatively complex and unreliable due to the existence of notch filter. In this work, a more simple and robust control system is realized with the help of mode-matching control. With a tuning voltage automatically applied on the tuning combs of the gyroscope, a frequency split of less than 0.3 Hz is achieved. Experimental results show that the mode-matched gyroscope achieves a scale factor of 18.5mV/deg/s with a nonlinearity of 0.088% and a bias instability of 2.7deg/h.
An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope

Jian Cui,Z. Y. Guo,Q. C. Zhao,Z. C. Yang,Y. L. Hao,G. Z. Yan

DOI: https://doi.org/10.4028/www.scientific.net/kem.483.43

2011-01-01

Key Engineering Materials

Abstract:This paper proposed an effective approach for extending the bandwidth of MEMS vibratory gyroscope by employing the electrostatic force feedback control. The mathematical model for the bandwidth is established through the dynamic model of the gyroscope, which indicates that the bandwidth of the sensor depends on the difference between the resonant frequencies of the two working modes. The system bandwidth can be enlarged by utilizing electrostatic force rebalance control to null Coriolis force caused by external angular rate which can also improve the performance of the transient response. Simulation results forecast a satisfactory performance of the control system with suggested control method.
A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

chunhua he,qinwen huang,yunfei en,qiancheng zhao,zhenchuan yang,guizhen yan

DOI: https://doi.org/10.1109/EDSSC.2014.7061183

2014-01-01

Abstract:This paper presents a novel optimization design method for the closed loop control of the sense mode of a MEMS gyroscope, which aims at improving the performances and reliability of the control system.
A sub 0.8 degree per hour mode-matching MEMS vibratory gyroscope with closed loop control for the sense mode

Chunhua He,Qiancheng Zhao,Dachuan Liu,Zhenchuan Yang,Guizhen Yan

DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.260

2013-01-01

Key Engineering Materials

Abstract:A detailed analysis about the nonlinearity of a mode-matching MEMS vibratory gyroscope is presented in this paper, then closed loop control for the sense mode is adopted to improved the performances. Experimental results figure out that the mode-matching gyroscope with closed loop controlled sense mode achieves a scale factor of 65mV/deg/s with nonlinearity of 0.05% and asymmetry of 0.1%, and a bias instability of 0.77deg/h, while they are 60mV/deg/s, 1%, 4.6% and 9.8deg/h in the open loop controlled sense mode system, respectively. These performances can be improved by more than one order of magnitude in the closed loop control system.
A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

Wei Ma,Yiyu Lin,Siqi Liu,Xudong Zheng,Zhonghe Jin

DOI: https://doi.org/10.1088/1361-6439/aa4fd1

2016-12-20

Journal of Micromechanics and Microengineering

Abstract:This paper reports a novel oscillation control algorithm for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation (MEAM) technique, which enhances the robustness against the frequency variation of the driving mode, compared to the conventional EAM (CEAM) scheme. In this approach, the carrier voltage exerted on the proof mass is frequency-modulated by the drive resonant frequency. Accordingly, the pick-up signal from the interface circuit involves a constant-frequency component that contains the amplitude and phase information of the vibration displacement. In other words, this informational detection signal is independent of the mechanical resonant frequency, which varies due to different batches, imprecise micro-fabrication and changing environmental temperature. In this paper, the automatic gain control loop together with the phase-locked loop are simultaneously analyzed using the averaging method and Routh–Hurwitz criterion, deriving the stability condition and the parameter optimization rules of the transient response. Then, a simulation model based on the real system is set up to evaluate the control algorithm. Further, the proposed MEAM method is tested using a field-programmable-gate-array based digital platform on a capacitive vibratory gyroscope. By optimizing the control parameters, the transient response of the drive amplitude reveals a settling time of 45.2 ms without overshoot, according well with the theoretical prediction and simulation results. The first measurement results show that the amplitude variance of the drive displacement is 12 ppm in an hour while the phase standard deviation is as low as 0.0004°. The mode-split gyroscope operating under atmospheric pressure demonstrates an outstanding performance. By virtue of the proposed MEAM method, the bias instability and angle random walk are measured to be 0.9° h−1 (improved by 2.4 times compared to the CEAM method) and 0.068° (√h)−1 (improved by 1.4 times), respectively.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

Chunhua He,Qiancheng Zhao,Qinwen Huang,Dachuan Liu,Zhenchuan Yang,Dacheng Zhang,Guizhen Yan

DOI: https://doi.org/10.1109/jsen.2014.2371456

IF: 4.3

2015-04-01

IEEE Sensors Journal

Abstract:This paper presents a method to accomplish automatic and real-time mode-matching control for a microelectromechanical systems vibratory gyroscope based on improved fuzzy algorithm and neural network algorithm. Meanwhile, robust control for the sense mode is applied to enhance the reliability of the closed-loop system. Experimental results demonstrate that it only needs ~8 s to achieve mode-matching intelligently in the improved fuzzy control system. In addition, a mismatching error <;0.32 Hz is achieved over the temperature range from -40 °C to 80 °C in the neural network real-time control system, which is improved by more than one order of magnitude compared with that of once-time control system. In addition, the temperature coefficient of the zero bias is also improved to be 0.5°/h/°C in the real-time mode-matching control system. Experimental results of phase margin, gain margin, and sensitivity margin indicate that the closed-loop system is stable and robust enough over the full temperature range. Moreover, the bandwidth and bias instability of the mode-matching gyroscope with closed-loop controlled sense mode are >85 Hz and <;5°/h, respectively.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Digital controller design for sense mode of micro-machined gyroscope

long wang,c h he,yu xian liu,d c liu,l t lin,z c yang,g z yan

DOI: https://doi.org/10.4028/www.scientific.net/AMM.336-338.940

2013-01-01

Applied Mechanics and Materials

Abstract:This paper presents one kind of digital closed loop control system of MEMS (Micro Electro-Mechanical Systems) vibratory gyroscope, particularly concentrating on the sense mode of MEMS gyroscope. The controller consists of a sine wave source realized by CORDIC algorithm, multiplication demodulators, some low-pass filters and force feedback rebalance module. Compared with the open loop sense system of gyroscope, the closed loop sense system has larger measurement range and wider bandwidth. Besides, the sine wave source realized with CORDIC algorithm can save hardware resources. The digital system is demonstrated on a PCB with a FPGA on it. The test results show that the measurement range of the closed loop system can be increased to 3 times by the open loop, and the bandwidth can be extended to 262Hz from 27Hz of the open loop system.
Analysis and design of a 3rd order velocity-controlled closed-loop for MEMS vibratory gyroscopes

Huan-ming Wu,Hai-gang Yang,Tao Yin,Ji-wei Jiao

DOI: https://doi.org/10.3390/s130912564

2013-09-18

Abstract:The time-average method currently available is limited to analyzing the specific performance of the automatic gain control-proportional and integral (AGC-PI) based velocity-controlled closed-loop in a micro-electro-mechanical systems (MEMS) vibratory gyroscope, since it is hard to solve nonlinear functions in the time domain when the control loop reaches to 3rd order. In this paper, we propose a linearization design approach to overcome this limitation by establishing a 3rd order linear model of the control loop and transferring the analysis to the frequency domain. Order reduction is applied on the built linear model's transfer function by constructing a zero-pole doublet, and therefore mathematical expression of each control loop's performance specification is obtained. Then an optimization methodology is summarized, which reveals that a robust, stable and swift control loop can be achieved by carefully selecting the system parameters following a priority order. Closed-loop drive circuits are designed and implemented using 0.35 μm complementary metal oxide semiconductor (CMOS) process, and experiments carried out on a gyroscope prototype verify the optimization methodology that an optimized stability of the control loop can be achieved by constructing the zero-pole doublet, and disturbance rejection capability (D.R.C) of the control loop can be improved by increasing the integral term.

A novel narrow-band force rebalance control method for the sense mode of MEMS vibratory gyroscopes

Force Rebalance Controller Synthesis for A Micromachined Vibratory Gyroscope Based on Sensitivity Margin Specifications

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

Closed loop control design for the sense mode of micromachined vibratory gyroscopes

Fuzzy Sliding-Mode Control of the Electrostatically Tuned Quasi-Zero Stiffness MEMS Accelerometer.

A Slot-Structure MEMS Gyroscope Working at Atmosphere With Tunable Electrostatic Spring Constant

A MICROMECHANICAL MODE-MATCHED GYROSCOPE USING STIFFNESS NONLINEARITY AND ELECTROSTATIC TUNING

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Design and Test of MEMS Gyroscope Control System Based on LMSD

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

Force Rebalance Control for a MEMS Gyroscope Using Ascending Frequency Drive and Generalized PI Control

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

An Electrostatic Force Feedback Approach for Extending the Bandwidth of MEMS Vibratory Gyroscope

A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

A sub 0.8 degree per hour mode-matching MEMS vibratory gyroscope with closed loop control for the sense mode

A novel oscillation control for MEMS vibratory gyroscopes using a modified electromechanical amplitude modulation technique

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

Digital controller design for sense mode of micro-machined gyroscope

Analysis and design of a 3rd order velocity-controlled closed-loop for MEMS vibratory gyroscopes