A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

chunhua he,qinwen huang,yunfei en,qiancheng zhao,zhenchuan yang,guizhen yan

DOI: https://doi.org/10.1109/EDSSC.2014.7061183

2014-01-01

Abstract:This paper presents a novel optimization design method for the closed loop control of the sense mode of a MEMS gyroscope, which aims at improving the performances and reliability of the control system.

What problem does this paper attempt to address?

High Performance Interface Circuit for MEMS Gyroscope

WANG Hui-quan,YU Fa-xin,JIN Zhong-he,ZHENG Xu-dong,CHEN Yong,JIAO Ji-wei,WANG Yue-lin

DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.04.053

2006-01-01

Abstract:Interface circuit for a MEMS gyroscope is optimized, which includes a close-loop driven circuit and a detected circuit. Output of the gyro is very low that the interface circuit followed it is very important. By carefully designing the interface circuit followed the gyro, the automatic gain control circuit in the close-loop driven circuit and the detected circuit, performance of the system is improved, the gyro’s resolution reaches 180°/h, with scale factor 9.8 mV/~ (o) ·s~ -1 , nonlinearity 0.43%.
Design and Test of MEMS Gyroscope Control System Based on LMSD

Shuai Guo,Xudong Zheng,Yiyu Lin,Wei Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/3m-nano.2017.8286267

2017-01-01

Abstract:In order to improve the performance of MEMS gyroscopes, the least mean square demodulation (LMSD) algorithm is utilized in MEMS gyroscope control system. By using Matlab tool, the simulation result shows that the LMSD algorithm has better noise suppression performance than multiplicative demodulation (MD). LMSD algorithm is carried out in field-programmed-gate-array (FPGA) and experimental results are in good agreement with the simulation. Combining with automatic gain control (AGC) and phase-locked loop (PLL) technology, the amplitude variance and phase variance of drive mode are respectively 62ppm and 0.001°. The nonlinearity of scale factor based on LMSD algorithm is 0.068%. Moreover, the gyroscope using LMSD exhibits a bias stability (BS) of 1.8°/h and an angle random walk (ARW) of 0.031°/Vh, better than the BS 6.7°/h and ARW 0.114°/Vh using MD. The experiment proves the feasibility and effectiveness of LMSD algorithm in the digital control system of MEMS gyroscope.
A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization

Haoyu Gu,Wei Su,Baolin Zhao,Hao Zhou,Xianxue Liu

DOI: https://doi.org/10.3390/mi11010075

IF: 3.4

2020-01-09

Micromachines

Abstract:This paper presents a novel multi-objective parameter optimization method based on the genetic algorithm (GA) and adaptive moment estimation (Adam) algorithm for the design of a closed-loop control system for the sense mode of a Microelectromechanical systems (MEMS) gyroscope. The proposed method can improve the immunity of the control system to fabrication tolerances and external noise. The design procedure starts by deriving a parameterized model of the closed-loop of the sense mode. The loop parameters are then optimized by the GA. Finally, the ensemble of optimized loop parameters is tested by Monte Carlo analysis to obtain a robust optimal solution. Simultaneously, the Adam-least mean square (LMS) demodulator, which is appropriate for the demodulation of very noisy signals, is also presented. Compared with the traditional method, the time consumption of the design process is reduced significantly. The digital control system is implemented by the print circuit board based on embedded Field Programmable Gate Array (FPGA). The experimental results show that the optimized control loop has achieved a better performance, the system bandwidth in open-loop and optimal closed-loop control system is about 23 Hz and 101 Hz, respectively. Compared to a non-optimized closed-loop system, the bias instability reduced from 0.0015°/s to 7.52 × 10−4°/s, the scale factor increased from 17.7 mV/(°/s) to 23 mV/(°/s) and the non-linearity of the scale factor reduced from 0.008452% to 0.006156%.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

y x liu,w l feng,c h he,lingfeng wang,l g dong,q c zhao,z c yang,g z yan

DOI: https://doi.org/10.1109/NEMS.2014.6908790

2014-01-01

Abstract:This paper presents a digital closed loop control method for the sense mode of a mode-matching MEMS vibratory gyroscope. The sense closed loop system reported in our previous work is relatively complex and unreliable due to the existence of notch filter. In this work, a more simple and robust control system is realized with the help of mode-matching control. With a tuning voltage automatically applied on the tuning combs of the gyroscope, a frequency split of less than 0.3 Hz is achieved. Experimental results show that the mode-matched gyroscope achieves a scale factor of 18.5mV/deg/s with a nonlinearity of 0.088% and a bias instability of 2.7deg/h.
MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Yi-yu LIN,Xu-dong ZHENG,Hai-bin WU,Zhi-peng MA,Zhong-he JIN

DOI: https://doi.org/10.3785/j.issn.1008-973X.2019.09.019

2019-01-01

Abstract:A novel drive-mode control scheme for MEMS gyroscopes was presented, where the gyroscopes were parametrically excited with constant resonant frequency. The proposed control scheme enabled a constant resonant frequency excitation with parametric amplification in the drive mode via triangular parallel capacitors, to keep the resonant frequency and quality factor constant against environmental fluctuations, and to improve the gyroscope temperature performance. First, frequency tuning and parametric excitation by means of triangular capacitors were introduced. Then, a new control scheme based on parametric excitation at constant frequency was proposed and implemented. The simulation results indicate that the resonant frequency is tuned to be constant and the dive-mode vibration amplitude is controlled to be stable. Finally, the experimental results indicate that the bias instability of gyroscope was 1.69°/h, which was better than that of the traditional scheme, and the temperature drift of zero-rate output during temperature cooling down was reduced to half compared to the traditional control scheme.
Performance Improvement for MEMS Gyroscopes by Suppressing the Circuit Phase Delay

Haibin Wu,Xudong Zheng,Xuetong Wang,Qiongxia Pang,Yaojie Shen,Zhipeng Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/mems51782.2021.9375419

2021-01-01

Abstract:This paper analyzes the impact of the interface circuit phase delay both in gyroscope drive mode and sense mode. An automatic signal processing algorithm for eliminating the impact of circuit phase delay is proposed, which combines the modified double sideband demodulation in the drive mode, quadrature nulling, force rebalanced control in the sense mode together. The impact of circuit phase delay on gyroscope performance is validated by experiments. With the impact of interface circuit phase delay suppressed, bias instability and angle random walk of the fully-symmetrical slot-structure gyroscope are 0.229°/h and 0.011°/√h, respectively, improved by 3.48 times and 10 times compared to the condition without phase suppression. After 1s average, the instability of 0.0004 °/s in the standard deviation is achieved.
A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

Haibin Wu,Xudong Zheng,Xuetong Wang,Yaojie Shen,Zhipeng Ma,Zhonghe Jin

DOI: https://doi.org/10.1109/jsen.2021.3110054

IF: 4.3

2021-01-01

IEEE Sensors Journal

Abstract:We propose a MEMS gyroscope system working with a fixed resonance frequency which combines resonant constant-frequency (RCF) driving and real-time automatic mode-matching technique with the help of linear tuning triangular capacitors. The special tuning capacitors are implemented in both the gyroscope drive mode and sense mode as drive-mode frequency-tuning (DFT) and sense-mode frequency-tuning (SFT), respectively. RCF assures that the drive-mode equivalent resonance frequency after tuned can keep with the given constant excitation frequency, while real-time automatic mode-matching further eliminates mismatches between the drive-mode and sense-mode equivalent resonance frequencies. As a result, the gyroscope system achieves constancy and equality of the excitation frequency and two modal resonance frequencies. Performance evaluations show that the gyroscope with the sense mode quality factor of 26.7k reaches bias instability of 0.09 degrees/h and angle random walk of 0.0087 degrees/root h under room temperature without any compensation, and is capable of detecting an angular rate as low as 0.001 degrees/s.
A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Haibin Wu,Xudong Zheng,Yaojie Shen,Xuetong Wang,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1109/sensors47087.2021.9639632

2021-01-01

Abstract:The work illustrates a resonant constant-frequency (RCF) driving technique used in a MEMS gyroscope which has linear frequency-tuning triangular capacitors. Differing from that conventional driving technique where the gyroscope excitation frequency is time-varying, the RCF strategy assures that the excitation frequency and resonant frequency are equal and constant in the gyroscope drive mode by means of frequency-tuning feedback. As a result, RCF can eliminate effects of excitation-frequency instability and drift on gyroscope output performance. Combining RCF with real-time automatic mode-matching, the tested gyroscope with sense-mode quality factor of 26.75k has achieved bias instability of 0.09 °/h and angle random walk of 0.0087°/√h.
Comprehensive Optimization of Pid-Type Closed-Loop Mems Accelerometer System

Mingjun Ma,Zhonghe Jin,Shichang Hu,Huijie Zhu,Zhongyi Zhu,Yidong Liu

DOI: https://doi.org/10.1109/3m-nano.2013.6737429

2013-01-01

Abstract:The paper introduces specific ways of optimizing Proportional-Integral-Derivative (PID) type closed-loop Microelectromechanical System (MEMS) accelerometer system performance under fixed boundaries. Parameters tuning is applied to enhancing loop gain, under which configuration the tested Total Noise Equivalent Acceleration (TNEA) is around 3.2ug-√Hz @10Hz with bandwidth over 200Hz. This result is approaching this system's performance limit.
A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope

Xuetong Wang,Xudong Zheng,Yaojie Shen,Chenhao Xia,Guowen Liu,Zhonghe Jin,Zhipeng Ma

DOI: https://doi.org/10.1109/jsen.2022.3204431

IF: 4.3

2022-01-01

IEEE Sensors Journal

Abstract:This article proposes a digital control structure for a doubly decoupled gyroscope working in the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops (PLLs), which demodulates the angular rate signal directly from the readable digital gyroscope resonance frequency, eliminating the need for specific frequency readout circuits. The resonance frequencies of the LFM gyroscope working modes contain a mode mismatch frequency modulated by input angular rate, respectively, which are tracked by two digital PLLs followed by subsequent digital demodulation and filtering. A linearized model of the digital PLL is built to analyze noise and control characteristics for different PI parameters. The impact of different amplitude–phase extraction architectures on the extracted phase signal is also addressed in this article. Contrast experiments are carried out using the same gyroscope with large internal thermal stress due to the silicon-glass bonding process and no stress relief structure around the sensing element, working in the traditional amplitude-modulated (AM) mode and the LFM mode. Overall, the LFM working mode maintains its low-temperature sensitivity and high stability in spite of the large internal thermal stress in the gyroscope compared to AM working modes. The maximum scale factor variation over the temperature range from 10 °C to 50 °C is 1000 ppm for the LFM mode compared to 51 900 ppm for the AM closed mode. The maximum zero rate output drift over the same temperature range is 0.1248 °/s for the LFM mode and 10.7139 °/s for the AM closed mode. The scale factor nonlinearity is 329 ppm with an angular rate input range of ±50 °/s for the LFM mode compared to 1902 ppm for the AM closed mode. The LFM mode zero-bias fluctuation for ten days is less than 0.12 °/s. The angle random walk (ARW) and the bias instability (BI) of the LFM gyroscope are 0.316 °/ $\surd \text{h}$ and 2 °/h, respectively.
Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Huijie Zhu,Zhonghe Jin,Shichang Hu,Wei Ma,Yidong Liu

DOI: https://doi.org/10.1109/3m-nano.2013.6737430

2013-01-01

Abstract:Variable-area capacitor with tuning capability is used to control the drive mode of MEMS gyroscopes for constant-frequency oscillation. The proposed control approach tunes the drive axis natural frequency to a preselected frequency and regulates the amplitude of the drive axis vibration. The algorithm mainly implemented using a field-programmable-gate-array (FPGA) is tested on a MEMS gyroscope operating at atmospheric pressure which is of our own manufacture. First measurement results of the novel digital prototype show the amplitude variance of the detected signal of drive axis is 26ppm in an hour while the phase variance is 45ppm.
Digital controller design for sense mode of micro-machined gyroscope

long wang,c h he,yu xian liu,d c liu,l t lin,z c yang,g z yan

DOI: https://doi.org/10.4028/www.scientific.net/AMM.336-338.940

2013-01-01

Applied Mechanics and Materials

Abstract:This paper presents one kind of digital closed loop control system of MEMS (Micro Electro-Mechanical Systems) vibratory gyroscope, particularly concentrating on the sense mode of MEMS gyroscope. The controller consists of a sine wave source realized by CORDIC algorithm, multiplication demodulators, some low-pass filters and force feedback rebalance module. Compared with the open loop sense system of gyroscope, the closed loop sense system has larger measurement range and wider bandwidth. Besides, the sine wave source realized with CORDIC algorithm can save hardware resources. The digital system is demonstrated on a PCB with a FPGA on it. The test results show that the measurement range of the closed loop system can be increased to 3 times by the open loop, and the bandwidth can be extended to 262Hz from 27Hz of the open loop system.
A sub 0.8 degree per hour mode-matching MEMS vibratory gyroscope with closed loop control for the sense mode

Chunhua He,Qiancheng Zhao,Dachuan Liu,Zhenchuan Yang,Guizhen Yan

DOI: https://doi.org/10.4028/www.scientific.net/KEM.562-565.260

2013-01-01

Key Engineering Materials

Abstract:A detailed analysis about the nonlinearity of a mode-matching MEMS vibratory gyroscope is presented in this paper, then closed loop control for the sense mode is adopted to improved the performances. Experimental results figure out that the mode-matching gyroscope with closed loop controlled sense mode achieves a scale factor of 65mV/deg/s with nonlinearity of 0.05% and asymmetry of 0.1%, and a bias instability of 0.77deg/h, while they are 60mV/deg/s, 1%, 4.6% and 9.8deg/h in the open loop controlled sense mode system, respectively. These performances can be improved by more than one order of magnitude in the closed loop control system.
Closed loop control design for the sense mode of micromachined vibratory gyroscopes

ChunHua He,QianCheng Zhao,YuXian Liu,ZhenChuan Yang,GuiZhen Yan

DOI: https://doi.org/10.1007/s11431-013-5201-x

2013-01-01

Science China Technological Sciences

Abstract:This paper presents a novel design method of force rebalance control for the sense mode of micromachined vibratory gyroscopes. Specific theoretical deductions are performed to identify a precise linear model of the open loop system of the sense mode, which is crucial for the PI controller design. The frequency responses obtained by experimental tests agree well with those calculated with the theoretical model, indicating the accuracy of the theoretical analyses. Experimental results demonstrate that the bandwidth of the closed loop is extended to 94.8 Hz from 2.3 Hz in the open loop and the quadrature signal is suppressed by about 64 dBV in the closed loop system. The overshoot and stable time in the step response of the closed loop system are measured to be about 15% and 35 ms, respectively. The mode-splitting gyroscope with the closed loop controlled sense mode achieves a scale factor of 41.0 mV/deg/s with nonlinearity of 0.09% and asymmetry of 1%, and a bias instability of 4.0 °/h with angle random walk of 0.171 deg/h 1/2 .
A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design

ChunHua He,QianCheng Zhao,QinWen Huang,LongTao Lin,ZhenChuan Yang,DaCheng Zhang,GuiZhen Yan

DOI: https://doi.org/10.1007/s11431-016-0504-7

2016-01-01

Abstract:This paper proposes a novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design. The principles of fuzzy reliability and Taguchi design are both introduced and described in detail. Experimental results demonstrate that the signal to noise ratio of the robust design scheme is better than those of the other experimental schemes. Over the full temperature range from −40 to 80°C, the temperature sensitivities of phase margin, gain margin, sensitivity margin, the maximum amplitude of open loop system, bandwidth of closed loop system, and the performance function of the robust design system are all smaller than those of the original design system. Meanwhile, the temperature sensitivity of the bandwidth of the robust design system is improved to 126 from 1075 ppm/°C. Moreover, the bias drift over the full temperature range of the robust design system is improved to 61°/h from 179°/h.
A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

Chunhua He,Qiancheng Zhao,Qinwen Huang,Dachuan Liu,Zhenchuan Yang,Dacheng Zhang,Guizhen Yan

DOI: https://doi.org/10.1109/jsen.2014.2371456

IF: 4.3

2015-04-01

IEEE Sensors Journal

Abstract:This paper presents a method to accomplish automatic and real-time mode-matching control for a microelectromechanical systems vibratory gyroscope based on improved fuzzy algorithm and neural network algorithm. Meanwhile, robust control for the sense mode is applied to enhance the reliability of the closed-loop system. Experimental results demonstrate that it only needs ~8 s to achieve mode-matching intelligently in the improved fuzzy control system. In addition, a mismatching error <;0.32 Hz is achieved over the temperature range from -40 °C to 80 °C in the neural network real-time control system, which is improved by more than one order of magnitude compared with that of once-time control system. In addition, the temperature coefficient of the zero bias is also improved to be 0.5°/h/°C in the real-time mode-matching control system. Experimental results of phase margin, gain margin, and sensitivity margin indicate that the closed-loop system is stable and robust enough over the full temperature range. Moreover, the bandwidth and bias instability of the mode-matching gyroscope with closed-loop controlled sense mode are >85 Hz and <;5°/h, respectively.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
The Analysis and Design of Closed-Loop Control System for MEMS Vibratory Gyroscopes

Jia Xin Yu,Qin Shi,Guo Ming Xia,An Ping Qiu,Xue Hao Yu,Zhong Hai Pei

DOI: https://doi.org/10.4028/www.scientific.net/amm.868.51

2017-07-01

Applied Mechanics and Materials

Abstract:A digital closed-loop control system with all digital phase locked loop (ADPLL) is designed and optimized, in order to improve the bias stability and transient response of the gyroscope. The nonlinear mathematical models for the closed-loop amplitude and phase control system are established. The linearization method is applied to analyze the nonlinear models. The control parameters of the drive loop are optimized. The experimental results show that the phase deviation between the demodulation reference signal of the drive loop and the sense signal is less than 0.25° in the temperature range from-40°C to 60°C, within 0.15° of the variation. At room temperature, the overshoot amount of the gyroscope control system is 4.5% with setting time of 0.12s. The bias stability is 1.45°h. Compared to the analog control scheme, the digital control system has advantages of short setting time, small overshoot, short phase locked time, large locked range, high phase precision, etc.
Design of an interface circuit system for mode-separation MEMS digital gyroscope

Huan Zhang,Liang Yin,Weiping Chen,Qiang Fu

DOI: https://doi.org/10.1142/s0217984923420162

2023-12-14

Modern Physics Letters B

Abstract:Modern Physics Letters B, Ahead of Print. In this paper, a novel digital closed-loop interface circuit system of MEMS vibrating gyroscope is proposed, which includes driving, detection and quadrature circuits. Because of the high sensitivity and precision of the MEMS gyroscope, the interface circuit system is established under the condition of mode separation. The driving circuit of MEMS gyroscope adopts digital automatic gain control (AGC) to realize self-excitation closed-loop control, which makes the gyroscope system simple in structure and good in robustness. First, the working principle of the gyroscope's sensitive structure is introduced and the system simulation model of the sensitive structure is developed. Second, a [math] ADC and DAC with single-bit output are designed and the feasibility of the driving circuit design is verified by the system-level model. Third, the quadrature closed-loop correction circuit is designed to reduce the coupling of the quadrature component to the gyroscope detection circuit. The simulation results show that the quadrature correction loop can effectively reduce the influence of the quadrature coupling on the detection loop of MEMS gyroscope. Finally, the system-level model of the gyroscope is established by SIMULINK, the overall system performance of the gyroscope is analyzed, and the test system of MEMS gyroscope is built by field-programmable gate array (FPGA) and application specific integrated circuit (ASIC). The experiment verifies the feasibility of the digital interface circuit design, and the zero-bias instability of the gyroscope system is 1.0∘/h.

physics, condensed matter, applied, mathematical
Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope

Shang-chun FAN,Lu-da WANG,Zhan-she GUO

DOI: https://doi.org/10.3873/j.issn.1000-1328.2010.10.017

2010-01-01

Abstract:This paper introduces a novel micro-electromechanical systems (MEMS) vibratory rate gyroscope based on resonant sensing of the Coriolis force. Its advantages include a quasi-digital FM (frequency modulation) output, high sensitivity, and flexible parameter design. As a whole, this structure is consisted of proof masses, frame suspensions, two-stage amplifying leverage mechanisms, double-ended tuning fork (DETF), driving and checking combs. The simulation results show that, while other performances do not change a lot, the sensitivity of the initial structure, the improved structure 1, the improved structure 2 and the final structure are 0.080, 0.210, 0.341 and 0.5447 Hz/(°/s)respectively. The sensitivity increased a lot after each improvement. Moreover, for the final structure, the amplitude of DETF is 1.16×10-4 times as big as that of the external mass in the driven direction. And the maximum relative deviation is 6.41×10-7 on the measurement range (±300°/s).
Digital Closed-Loop Control Based on Adaptive Filter for Drive Mode of a MEMS Gyroscope

Dachuan Liu,N. N. Lu,J. Cui,L. T. Lin,H. T. Ding,Z. C. Yang,Y. L. Hao,Guizhen Yan

DOI: https://doi.org/10.1109/icsens.2010.5689902

2010-01-01

Abstract:This paper describes the design of a digital closed drive loop for a MEMS vibratory, vacuum packaged gyroscope. The displacement of the gyroscope is demodulated by the adaptive filter-least mean square (LMS) though which the amplitude and phase of the displacement are separated for respective control. The amplitude is kept constant by the automatic gain control (AGC) method with a proportion-integral (PI) controller while the phase is controlled by phase locked loop (PLL). Results of experiments carried out on field-programmed-gate-array (FPGA) with a doubly decoupled bulk gyroscope are shown to be in close agreement with simulation results. The amplitude variance of the detect signal of drive mode is 28ppm in half an hour while the phase variance is 770ppm.

A reliable MEMS gyroscope with optimization design for closed loop control of the sense mode

High Performance Interface Circuit for MEMS Gyroscope

Design and Test of MEMS Gyroscope Control System Based on LMSD

A Design Methodology of Digital Control System for MEMS Gyroscope Based on Multi-Objective Parameter Optimization

Design of a digital closed control loop for the sense mode of a mode-matching MEMS vibratory gyroscope

MEMS gyroscopes parametric excitation control scheme with constant resonant frequency

Performance Improvement for MEMS Gyroscopes by Suppressing the Circuit Phase Delay

A 0.09°/h Bias-Instability MEMS Gyroscope Working with a Fixed Resonance Frequency

A Sub-0.1°/H Bias-Instability MEMS Gyroscope Using Resonant Constant-Frequency Driving Technique

Comprehensive Optimization of Pid-Type Closed-Loop Mems Accelerometer System

A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Digital controller design for sense mode of micro-machined gyroscope

A sub 0.8 degree per hour mode-matching MEMS vibratory gyroscope with closed loop control for the sense mode

Closed loop control design for the sense mode of micromachined vibratory gyroscopes

A novel robust design method for the sense mode of a MEMS vibratory gyroscope based on fuzzy reliability and Taguchi design

A MEMS Vibratory Gyroscope With Real-Time Mode-Matching and Robust Control for the Sense Mode

The Analysis and Design of Closed-Loop Control System for MEMS Vibratory Gyroscopes

Design of an interface circuit system for mode-separation MEMS digital gyroscope

Optimization of Sensitivity for a Novelly-Designed MEMS Resonant Gyroscope

Digital Closed-Loop Control Based on Adaptive Filter for Drive Mode of a MEMS Gyroscope